Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.

Xuanjun Liu

Yan Xie

The present application provides a method for manufacturing a semiconductor, comprising providing a substrate, on which a first, second and third dielectric layers are successively formed, the third dielectric layer having an initial opening; forming a first deposited layer which at least covers a side wall of the initial opening to form a first mask layer having a first opening; removing the second dielectric layer directly below the first opening to expose a side wall of the second dielectric layer; forming a second deposited layer which at least covers the side wall of the first opening and the exposed side wall of the second dielectric layer, to form a second mask layer having a second opening; removing the first dielectric layer directly below the second opening to expose the substrate; and removing the second mask layer, and forming a trench by etching the substrate.

Semiconductor manufacturing method

A method for manufacturing a semiconductor device is provided. A substrate is provided, where a cover layer is formed on the substrate, a wiring layer is formed in the cover layer, a layer to be etched is formed on the cover layer, and the layer to be etched includes an adhesive layer. An exposure patterned film layer is formed on the layer to be etched. A first etching hole pattern is formed in the exposure patterned film layer. The layer to be etched is etched to form a blind hole by using the exposure patterned film layer as a mask. The exposure patterned film layer is trimmed to form a second etching hole pattern. The layer to be etched is further etched to form a bonding hole by using the trimmed exposure patterned film layer as a mask. A bonding pad is formed in the bonding hole.

Growing community of inventors

Hubei, China

Xuanjun Liu