Sequence Design, Inc.

Xu Yang

Robert G Mathews

Keh-Jeng Chang

Li-Fu Chang

A method models conductive regions of a semiconductor substrate in conjunction with conductors in the interconnect structures above the semiconductor substrate. Such a method allows highly accurate extraction of capacitance in planar (e.g., shallow trench isolation) and non-planar (e.g., thermal oxide isolation) semiconductor structures. This method is particularly applicable to modeling dummy diffusion regions prevalent in shallow trench isolation structures. An area-perimeter approach simplifies calculation of capacitance without using a 3-dimensional electric field solver. A method is also provided for extracting a capacitance associate with a contact, or a connecting conductor between two conductor layers.

Growing community of inventors

Sunnyvale, CA, United States of America

Xu Yang