Nanofilm Technologies International Limited

Filplas Vacuum Technology Pte Ltd.

Nanyang Technological University

Case Western Reserve University

Filpas Vacuum Technology Pte Ltd.

Sydrogen Energy Pte. Ltd.

Xu Shi

Hong Siang Tan

Beng Kang Tay

David Ian Flynn

Zhi Gang Tang

Li Kang Cheah

Ming Chu Yang

Kok How Tan

Barry Irwin Miller

Rafi Kalish

Michael Fulton

Xiao Zhe Jin

Lang Hu

Ting Wang

Zhi Tang

Lydia Helena Wong

Stener Lie

Anupam Sadhu

Guangyi Zhang

Kevin Chee Kuan Lim

Shengfu Zhao

The invention provides a substrate coated with a multi-layer coating, comprising in order: (a) the substrate; (b) a thermally insulating layer (e.g. SiN); (c) an interfacial layer (e.g. SiC); and (d) one or more layers comprising ta-C; wherein the interfacial layer promotes adhesion of the one or more layers comprising ta-C to the thermally insulating layer; and methods for producing such coatings.

Temperature resistant carbon coatings

A cathode arc source comprises: a cathode target; a first magnetic field source located above the target; a second magnetic field source located below the target; and a third magnetic field source located between the first and second magnetic field sources and having an opposite polarity to the first magnetic field source; wherein the resultant magnetic field from the first, second and third magnetic field sources has zero field strength in a direction substantially normal to the target at a position above the target. The invention also provides methods of striking a cathode target and methods of depositing coatings which can be carried out using the cathode arc source described herein.

Cathode arc source

An electrode for electrochemical applications is coated with a layer of a-C, wherein the layer of a-C comprises at least 10 each of first and second sub-layers, being—(i) first sub-layers having high conductivity with a sp2 content of 60-95%, alternating with—(ii) second sub-layers having high corrosion resistance with a sp2 content of 50-90%, wherein the sp2 content of the first sub-layers is at least 3% greater than the sp2 content of the second sub-layers. A method of making such electrodes comprises: —a) depositing a first sub-layer comprising a-C, —b) depositing a second sub-layer comprising a-C wherein the sp2 content of the first sub-layer is at least 3% greater than the sp2 content of the second sub-layer, and—c) repeating the steps above to deposit at least 10 first sub-layers alternating with 10 second sub-layers, so as to produce the electrodes.

Carbon coated electrodes

A filter () for a cathode arc source comprises: a filter duct having at least one bend (), and a first magnetic field source for steering plasma through the filter duct for removal of macroparticles from the plasma; wherein the apparatus comprises a second magnetic field source () which is rotatably mounted surrounding a portion of the filter duct. Cathode arc sources () and cathode arc deposition apparatuses () comprise the filters described herein, and methods of filtering macroparticles from a beam of plasma emitted from a cathode arc source use the filters.

Cathode arc source, filters thereof and method of filtering macroparticles

A bipolar plate for a PEM hydrogen fuel cell is coated with a carbon-containing coating, the carbon-containing coating comprising in order: a) a titanium seed layer; b) a titanium nitride interfacial layer; and c) a a-C top layer, and wherein the bipolar plate is formed from stainless steel. Methods for making such coated plates are described. The a-C has a density of greater than 2.0 g/cm3, a molar hydrogen content of 5% or less, an sp2 carbon content of 40% to 80% and an sp3 carbon content of 20% to 60%. The coated plates possess good electrical conductivity and are resistant to corrosion.

Carbon coated hydrogen fuel cell bipolar plates

A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.

ta-C based coatings with improved hardness

An arc deposition apparatus comprises an evacuatable chamber and means for positioning at least two targets in the chamber, wherein a first one of the at least two targets is positionable in an operative position and another of the at least two targets is positionable in a standby position. An electrical power supply is provided for supplying electrical power to the target held in the operative position to form an arc on an emission surface of the operative target. Means are provided for preparing an emission surface of the target positioned in the standby position to have a predetermined morphology. Alternatively, or in conjunction with the surface preparing means, means are provided for inspecting whether the emission surface of the target positioned in the standby position has a predetermined morphology. Preferably, the positioning means is configured to interchange the at least two targets at a predetermined time.

Continuous ARC deposition apparatus and method with multiple available targets

A cathode arc source for depositing a coating on a substrate has an anode and a cathode station for a target, a first filter means comprising a filter duct having at least one bend, and first magnetic means for steering plasma through the filter duct for removal of macroparticles from the plasma. The apparatus comprises a second filter () for further removal of macroparticles from the plasma, made up of a baffle (), an aperture () through which plasma can pass and second magnetic means () for steering plasma through the aperture. The aperture size may be less than 33% of the duct sectional area at that point. The source can also include an ion beam generator. Also described is a method of depositing coatings of ions using the second filter and closing the aperture in the filter when required.

Enhanced macroparticle filter and cathode arc source

A method for forming a conductive region on a first portion of a substrate, the method being constituted by exposing the first portion to a filtered beam of substantially fully ionised metallic ions under a pulsed, modulated electrical bias. The method uses FCVA (Filtered Cathodic Vacuum Arc) techniques to generate the filtered ion beam and permits the formation of a conformal metal coating, even in high aspect ratio visa and trenches. The method also permits the in-filling of vias and trenches to form conductive interconnects. Particular examples concern the deposition of copper ions. An adapted FCVA apparatus deposits metals on substrates. A control apparatus controls ion beams impacting upon substrates, the control apparatus being suitable for incorporation within existing filtered ion beam sources.

Copper interconnects

The invention describes composite coatings, in particular comprising carbon and another metallic element such as silicon or aluminum. These coatings have improved properties compared with pure tetrahedral amorphous carbon coatings, in that they have reduced stress levels and can be deposited at higher thicknesses, while retaining acceptable hardness and other useful mechanical properties. Also described are methods of making composite coatings, materials for making the coatings and substrates coated therewith. Specifically, a method of applying a coating to a substrate using a cathode arc source, comprises generating an arc between a cathode target and an anode of the source and depositing positive target ions on the substrate to form the coating, wherein the coating is a composite of at least first and second elements and the target comprises said at least first and second elements. A composite coating comprises tetrahedral amorphous carbon and a metallic element other than carbon, the composite coating having an spcontent of at least 60%. A target for use in a cathode arc source comprises a mixture of carbon and a metallic element other than carbon.

Composite coatings

A cathode arc source has means for generating first and second magnetic fields, of opposite or reverse direction to each other. The resultant magnetic field includes a null point between the target and the substrate, though close to the target. Field strength normal to the target is zero at the null point, and field strength lateral to the target is strong at the target surface, constraining movement of the arc spot and reducing the risk of migration off the target surface. A target is made by pressing graphite powder at elevated temperature and pressure in the absence of binding material. Both source and target contribute to reduced macroparticles in deposited films.

Cathode arc source with magnetic field generating means positioned above and below the cathode

Deposition apparatus incorporating either a single or multiple filtered cathodic arc (FCA) source for depositing coatings such as tetrahedral amorphous carbon (TAC); metal oxides; compounds and alloys of such materials onto various types of substrates, such as metals semiconductors, plastics ceramics and glasses. Substrates are moved through the plasma beam(s) of the FCA source(s) and beam scanning increases deposition area. Macroparticles are filtered by a double bend filter duct.

Filtered cathode arc source deposition apparatus

Heat transfer surface

A cathode arc source for depositing a coating on a substrate has an anode and a cathode station for a target, a first filter means comprising a filter duct having at least one bend, and first magnetic means for steering plasma through the filter duct for removal of macroparticles from the plasma. The apparatus comprises a second filter for further removal of macroparticles from the plasma, made up of a baffle, an aperture through which plasma can pass and second magnetic means for steering plasma through the aperture. The source can also include an ion beam generator. Also described is a method of depositing coatings of ions using the second filter and closing the aperture in the filter when required.

An electrode ( ) formed from a layer ( ) of tetrahedral carbon doped with nitrogen (taC:N) has both electroanalytical and electrosynthetic applications. The electrode includes a substrate material ( ), such as a silicon wafer, for supporting the taC:N layer. The electrode has good durability under a high anodic potential and high selectivity for conversion of chloride ions to chlorine, and for other electron transfer reactions. The electrode is readily formed at ambient temperatures by vacuum deposition of carbon and nitrogen ions on to the substrate. Masking of the substrate during deposition allows the formation of microelectrode arrays.

Growing community of inventors

Singapore, Singapore

Xu Shi