Kla Corporation

University of Washington

Kla Tencor Corporation

Xiumei Liu

Brooke Bruguier

Richard Wallingford

Kai Cao

Matthew Giusti

Xingde Li

Ilya Bezel

Eric J Seibel

Anatoly Shchemelinin

Kenneth P Gross

Anant Chimmalgi

Richard William Solarz

Lauren Wilson

Qiang Q Zhang

Joshua Wittenberg

Rahul Yadav

Joo Ha Hwang

Bryant Mantiply

Stephen Taylor

An imaging system may include an imaging metrology tool with an illumination source, one or more illumination optics to direct illumination from the illumination source to a sample, a detector, one or more collection optics to image the sample onto the detector; and one or more aberration-controlling components. The one or more aberration-controlling components may provide aberration correction for imaging the sample onto the detector according to one or more degrees of freedom, where the one or more degrees of freedom include at least a defocus of the imaging system, and where the one or more aberration-controlling components are integrated with at least one of the one or more illumination optics, the one or more collection optics, or the detector.

Three-dimensional imaging with enhanced resolution

An auto-focusing system is disclosed. The system includes an illumination source. The system includes an aperture. The system includes a projection mask. The system includes a detector assembly. The system includes a relay system, the relay system being configured to optically couple illumination transmitted through the projection mask to an imaging system. The relay system also being configured to project one or more patterns from the projection mask onto a specimen and transmit an image of the projection mask from the specimen to the detector assembly. The system includes a controller including one or more processors configured to execute a set of program instructions. The program instructions being configured to cause the one or more processors to: receive one or more images of the projection mask from the detector assembly and determine quality of the one or more images of the projection mask.

Automated focusing system for tracking specimen surface with a configurable focus offset

A beam of light is directed from a light source at a wafer on a chuck. The beam of light is reflected off the wafer toward a 2D imaging camera. Movable focus lenses in the path of the beam of light can independently change the illumination conjugate and the collection conjugate. A structured mask in an illumination path can be used and the beam of light can be directed through apertures in the structured mask. A gray field image of a wafer in a zone without direct illumination is generated using the 2D imaging camera and locations of defects on the wafer can be determined using the gray field image.

Apparatus and method for gray field imaging

A system for automated focus tracking of a sample is disclosed. The system comprises an illumination source, a set of illumination optics in an illumination path, a set of collection optics in a collection path, a first slit device in the illumination path, a second slit device in the collection path, at least one detector configured to generate an image of the sample, and a controller configured to receive through-focus information from the image, and provide corrective motion to a stage holding the sample to maintain a position of the sample at a selected focus. A method for automated focus tracking of a sample is also disclosed.

Tilted slit confocal system configured for automated focus detection and tracking

Methods and systems for determining focus settings for use in a specimen scan are provided. One method includes generating a focus map defined as values of best focus as a function of position on a specimen using output generated in one or more pre-focus swaths scanned on the specimen by an output acquisition subsystem configured to direct energy to a specimen, to detect energy from the specimen, and to generate output responsive to the detected energy. The method also includes interpolating the focus map to generate focus settings for a scan performed on the specimen during a process and storing information for the generated focus settings for use in the scan performed on the specimen during the process.

Determining focus settings for specimen scans

A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

System and method for inhibiting radiative emission of a laser-sustained plasma source

Mechanically robust minimal form factor OCT probes suitable for medical applications such as needle biopsy, intraluminal and intravascular imaging are achieved in part by employing compound lenses with some or all of the optical elements, including an optical fiber, to be thermally fused in tandem. To achieve a desired working distance without increasing a diameter of the optics assembly, a spacer can be disposed between the optical fiber and focusing optics. The compound lens configuration can achieve higher transverse resolution compared to a single lens at a desired working distance without increasing the probe diameter. In exemplary needle biopsy embodiments, the optical assembly is encapsulated in a glass housing or metal-like housing with a glass window, which is then selectively passed through a hollow needle. Esophageal imaging embodiments are combined with a balloon catheter. Circumferential and three-dimensional spiral scanning can be achieved in each embodiment.

High resolution optical coherence tomography based imaging for intraluminal and interstitial use implemented with a reduced form factor

An optical fiber scanner is used for multiphoton excitation imaging, optical coherence tomography, or for confocal imaging in which transverse scans are carried out at a plurality of successively different depths within tissue. The optical fiber scanner is implemented as a scanning endoscope using a cantilevered optical fiber that is driven into resonance or near resonance by an actuator. The actuator is energized with drive signals that cause the optical fiber to scan in a desired pattern at successively different depths as the depth of the focal point is changed. Various techniques can be employed for depth focus tracking at a rate that is much slower than the transverse scanning carried out by the vibrating optical fiber. The optical fiber scanner can be used for confocal imaging, multiphoton fluorescence imaging, nonlinear harmonic generation imaging, or in an OCT system that includes a phase or frequency modulator and delay line.

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Fremont, CA, United States of America

Xiumei Liu