Applied Materials, Inc.

Xinyu Zhang

John C Forster

Michael Rosenstein

Marc O Schweitzer

James S Van Gogh

Alan Liu

Yoichiro Tanaka

Jennifer L Watia

Anthony Chen

In one embodiment, a target alignment surface disposed on a target support mechanically engages a darkspace shield alignment surface disposed on a darkspace shield as the target is lodged into a chamber body. The respective alignment surfaces are shaped and positioned so that the darkspace shield is physically moved to a desired aligned position as the alignment surfaces engage each other. In this manner a darkspace shield may be directly aligned to a target within a semiconductor fabrication chamber to provide a suitable darkspace gap between the target and the darkspace shield.

Method and apparatus for controlling darkspace gap in a chamber

Growing community of inventors

Fremont, CA, United States of America

Xinyu Zhang