Tokyo Electron Limited

Xingjun Jiang

Jun Fujihara

Tomoya Endo

Takanori Hyakudomi

Hiroshi Yamada

Kentaro Konishi

Hiroaki Hayashi

Kenichi Narikawa

Tetsuya Kagami

Shin Uchida

Hiroaki Sakamoto

Hiroki Shikagawa

Katsuaki Sugiyama

Yukinori Murata

Rika Ozawa

A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.

Testing system

An inspection system configured to inspect a device within a substrate is provided. The inspection system includes an inspection module, an alignment module, a supporting device and a fixing device. The inspection module has multiple testers and multiple inspection chambers. The multiple testers are allowed to be accommodated in the multiple inspection chambers, respectively. The alignment module has an aligner. The aligner is placed in an alignment space. The aligner is configured to adjust a position of the substrate to be inspected with respect to one tester of the multiple testers, which is accommodated in the alignment space. The supporting device is configured to support the tester accommodated in the alignment space from below. The fixing device is configured to fix the tester accommodated in the alignment space in cooperation with the supporting device.

Inspection system

Growing community of inventors

Nirasaki, Japan

Xingjun Jiang