University of California

Applied Materials, Inc.

Agency for Science, Technology and Research

Nanyang Technological University

National University of Singapore

Xin Wang

Yushan Yan

Kirankumar Neelasandra Savandaiah

Brett Holmberg

William R Johanson

Prashant Prabhakar Prabhu

Kam W Leong

Ananthkrishna Jupudi

Adolph Miller Allen

Chuan Yang

Sriskantharajah Thirunavukarasu

Yueh Sheng Ow

Jun Li

Junqi Wei

Jinghua Teng

Zhitao Cao

Suat Hong Goh

William Goddard

Zhongwei Chen

Wenzhen Li

Tien Hoa Nguyen

Mahesh Waje

Wei-Qiao Deng

Hongzhe Li

Jie Deng

Soo Seng Norman Ang

Xiaosong Eric Tang

Guang Hui Paul Lim

Ya Yan

Kai Dong Ye

A method of fabricating an optical lens disclosed herein includes forming a layer of a flat lens structure on a front surface of a substrate, depositing a protective metal layer on the layer of the flat lens structure and on a back surface of the substrate, wherein the protective layer includes chromium, gold, titanium, or nickel, wherein the back surface is located opposite to and away from the front surface having the layer of the flat lens structure, irradiating the protective metal layer at the front surface with a laser to form a channel (i) through the protective metal layer, (ii) through the layer of the flat lens structure and (iii) in the substrate, removing the protective metal layer at the front surface and the back surface of the substrate, and separating the layer of the flat lens structure from the substrate to obtain the optical lens, wherein the channel has a depth defined by a thickness of the substrate remaining at the channel after irradiating the protective metal layer at the front surface with the laser. The optical lens fabricated from the method is also disclosed herein.

Sub-mm flat lens fabrication

The present invention relates to a method for preparing a porous polyimide film, comprising reacting an aromatic dianhydride with one or more aromatic diamines in a suitable solvent to form poly(amic acid), adding a dehydrated agent of an acid anhydride and an organic base to the reaction mixture to convert the poly(amic acid) to a polyimide precursor, casting the reaction mixture comprising the polyimide precursor onto a solid support to form a film, coagulating the polyimide precursor in a coagulating bath comprising a mixture of a solvent and a non-solvent to develop a porous structure, and drying the coagulated polyimide precursor in air to form the porous polyimide film. A composite membrane comprising same and its use are also provided.

Method for preparing a porous polyimide film and a composite membrane comprising the same

Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.

Methods and apparatus for nodule control in a titanium-tungsten target

Embodiments of process kits and process chambers incorporating same are provided herein. In some embodiments, a process kit includes: a one-piece process kit shield having a cylindrical body having an upper portion and a lower portion; an adapter section extending radially outward and having a resting surface to support the one-piece process kit shield on walls of a chamber and a sealing surface on which a chamber lid rests to seal off an inner volume of the chamber when the one-piece process kit shield is placed in the chamber; a heat transfer channel extending through the adapter section; and a protruding section extending radially inward from the lower portion; a resting bracket having an upper portion coupled to the adapter section and a lower portion extending radially inward; a cover ring disposed beneath the protruding section; and a deposition ring disposed beneath the cover ring.

Integrated process kit for a substrate processing chamber

Embodiments of process kits and process chambers incorporating same are provided herein. In some embodiments, a process kit includes a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, including: an annular band configured to rest on a lower ledge of the substrate support; an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, and wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm; a channel disposed radially outward of the annular band; and an outer lip extending upwardly and disposed radially outward of the channel.

Process kit having tall deposition ring and deposition ring clamp

A method of synthesizing tungsten carbide nanorods, the method comprising: mixing tungsten oxide (WO) nanorods with a carbon source to obtain precursors; and calcining the precursors to obtain tungsten carbide nanorods, without use of any catalyst. A catalyst of metal nanostructures supported on tungsten carbide nanorods.

Method of synthesizing tungsten carbide nanorods and catalysts formed therewith

A suite of polymer/zeolite nanocomposite membranes. The polymer backbone is preferably a film forming fluorinated sulfonic acid containing copolymer, such as a Teflon type polymer, a perfluorinated polymer, or a perfluorinated polymer with sulfonic groups. The zeolites formed in accordance with the present invention and which are used in the membranes are plain, phenethyl functionalized and acid functionalized zeolite FAU(Y) and BEA nanocrystals. The zeolite nanocrystals are incorporated into polymer matrices for membrane separation applications like gas separations, and in polymer-exchange-membrane fuel cells. For the purpose of developing zeolite-polymer nanocomposite membranes, the zeolite nanocrystals are size-adjustable to match the polymer-network dimensions.

Polymer-zeolite nanocomposite membranes for proton-exchange-membrane fuel cells

Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

Carbon based electrocatalysts for fuel cells

A polycation capable of forming a complex with a nucleic acid for carriage thereof. The polycation comprising at least one cyclic compound having a cavity. A polymer backbone is threaded into the cavity of the cyclic compound. A pair of bulky moieties cap the terminals of the polymer backbone to inhibit dethreading of the cyclic compound from the polymer backbone. In use, the net positive charge of said polycation enables a complex to form with nucleic acid.

Polycationic polyrotaxanes capable of forming complexes with nucleic acids

A suite of polymer/zeolite nanocomposite membranes. The polymer backbone is preferably a film forming fluorinated sulfonic acid containing copolymer, such as a Teflon type polymer, a perfluorinated polymer, or a perfluorinated polymer with sulfonic groups. The zeolites formed in accordance with the present invention and which are used in the membranes are plain, phenethyl functionalized and acid functionalized zeolite FAU(Y) and BEA nonocrystals. The zeolite nanocrystals are incorporated into polymer matrices for membrane separation applications like gas separations, and in polymer-exchange-membrane fuel cells. For the purpose of developing zeolite-polymer nanocomposite membranes, the zeolite nanocrystals are size-adjustable to match the polymer-network dimensions.

Growing community of inventors

Singapore, Singapore

Xin Wang