Seiko Epson Corporation

Xin-shan Li

Masato Shimada

A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layerdisposed on the lower electrode film, a upper electrode filmdisposed on the piezoelectric layer, wherein the piezoelectric layeris formed of a plurality of columnar grains, and the upper electrode filmconforms to the surface shape of each of the grainsof the piezoelectric layer

Piezoelectric element, actuator device, liquid ejecting head, and liquid ejecting apparatus

Provided is a method of manufacturing a liquid ejecting head, the method including forming a piezoelectric element having a width in a reference direction longer than a width in an orthogonal direction orthogonal to the reference direction on a first substrate, and adhering a second substrate to a surface of the first substrate opposed to the piezoelectric element at a temperature higher than a normal temperature, wherein, in the adhering of the second substrate, the second substrate is adhered such that the first direction of the second substrate is adjusted to the reference direction, using a first thermal expansion coefficient in a first direction on an adhesion surface with the first substrate greater than a second thermal expansion coefficient in a second direction orthogonal to the first direction and the first thermal expansion coefficient greater than a thermal expansion coefficient of the first substrate.

Method of manufacturing a liquid ejecting head

Provided is a method of manufacturing a liquid ejecting head, the method including forming a piezoelectric element having a width in a reference direction longer than a width in an orthogonal direction orthogonal to the reference direction on a first substrate, and adhering a second substrate to a surface of the first substrate opposed to the piezoelectric element at a temperature lower than a normal temperature, wherein, in the adhering of the second substrate, the second substrate is adhered such that the first direction of the second substrate is adjusted to the reference direction, using a first thermal expansion coefficient in a first direction on an adhesion surface with the first substrate, the first thermal expansion coefficient is less than a second thermal expansion coefficient in a second direction orthogonal to the first direction and the first thermal expansion coefficient is less than a thermal expansion coefficient of the first substrate.

A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layerdisposed on the lower electrode film, a upper electrode filmdisposed on the piezoelectric layerwherein the piezoelectric layeris formed of a plurality of columnar grains, and the upper electrode filmconforms to the surface shape of each of the grainsof the piezoelectric layer

A liquid ejecting head includes: pressure generation chambers which communicate with nozzle orifices; and piezoelectric elements which induce pressure change in the pressure generation chambers and each include a first electrode, a piezoelectric body layer formed on the first electrode, and a second electrode formed on the side opposite to the first electrode of the piezoelectric body layer, wherein the piezoelectric body layer includes two dielectric films having the substantially same interstitial distance and an intervening layer provided between the two dielectric films and having a different interstitial distance from that of the dielectric film.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

An actuator device includes a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode that are displaceably provided in sequence on a substrate. The lower electrode includes a flat center portion and an inclined end portion that descends toward the substrate. The piezoelectric layer is disposed above the lower electrode and the substrate, and includes a first, second, and third piezoelectric layer portion constituted by a plurality of columnar crystals. The columnar crystals of the first and second piezoelectric layer portions are orthogonal to the flat portion of the lower electrode and surface of the substrate, while the columnar crystals of the third piezoelectric layer portion extend orthogonally from a surface of the inclined portion and bend to be orthogonal to the surface of the upper electrode, giving the grains of the columnar crystals of the third piezoelectric layer portion larger widths and increased stress resistance.

Actuator device and liquid ejecting head including the same

Provided is an actuator device including a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate having a silicon oxide layer formed by thermal oxidation on at least a surface, and an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.

Actuator device, method of manufacturing the same and liquid-jet head

In a step of forming a piezoelectric precursor film, an application solution is applied onto each of flow passage forming substrate wafers to form piezoelectric precursor films one by one on each of the plurality of flow passage forming substrate wafers constituting a flow passage forming substrate wafer group, and an order of the flow passage forming substrate wafers for starting the application of the application solution to be turned into each of the piezoelectric precursor films is varied by the predetermined number of wafers of the flow passage forming substrate wafer group.

Method of manufacturing of a liquid jet head, method of manufacturing of a piezoelectric element and a liquid jet apparatus

A method of manufacturing an actuator device includes forming a Zr layer on one surface of a substrate, forming a ZrOlayer by oxidizing the Zr layer, forming a lower electrode on top of the ZrOlayer, forming a piezoelectric layer on top of the lower electrode, and forming an upper electrode on top of the piezoelectric layer. In the method, in forming the Zr layer, the Zr layer is formed through crystal growth of Zr, and the Zr layer thus formed has special crystal regions that protrude from the opposite surface of the Zr layer from the substrate. Each special crystal region has a height of 10 to 100 nm and a diameter of 0.1 to 1 &#x3bc;m when viewed from above, and the special crystal regions exist with a density of 1.0&#xd7;10to 1.0&#xd7;10/cm.

Method of manufacturing an actuator device

A method is provided for manufacturing an actuator device including a substrate, a vibration plate, lower electrode, and a piezoelectric element having a piezoelectric layer, and an upper electrode. The vibration plate is formed by forming an insulating film comprised of a columnar crystalline zirconium layer whose surface has an average crystal grain size of about 20 to 50 nm on one surface the substrate, and then thermally oxidizing the zirconium layer into a columnar crystalline zirconium oxide layer whose surface has an average crystal grain size of about 20 to 50 nm. The zirconium layer shows an XRD pattern having a (002) plane peak with an FWHM of 0.4 or less. The piezoelectric element is formed on the lower electrode.

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Shiojiri, Japan

Xin-shan Li