Samsung Display Co., Ltd.

Korea University Research and Business Foundation

Sogang University Research Foundation

Xie Lei

Min Hyuck Kang

Tae Woo Kim

Seung-Won Park

Su Mi Lee

Myung Im Kim

Joona Bang

Bong-Jin Moon

Hyun Jung Jung

June Huh

Na Na Kang

Jin Yeong Lee

Sang Hoon Woo

Moon Gyu Lee

A block copolymer is provided. The block copolymer according to an exemplary embodiment includes a first block represented by Chemical Formula 1 and a second block represented by Chemical Formula 2: wherein COM1 and COM2 are independently selected from a polystyrene moiety, polymethylmethacrylate moiety, polyethylene oxide moiety, polyvinylpyridine moiety, polydimethylsiloxane moiety, polyferrocenyldimethylsilane moiety, and polyisoprene moiety, R1 is hydrogen or an alkyl group with 1 to 10 carbon atoms, Ph is a phenyl group, a is 1 to 50, R2 is hydrogen or an alkyl group with 1 to 10 carbon atoms, and b is 1 to 50.

Block copolymer, method of forming the same, and method of forming pattern

A method of forming a micropattern structure includes: coating a structure including a plurality of guide blocks extending in a first direction on a substrate and disposed to be spaced apart from each other in a second direction, which is perpendicular to the first direction, with a sacrificial material; ashing a portion of the sacrificial material to expose upper portions of the plurality of guide blocks; coating the structure with a first material having a polarity that is contrary to a polarity of a filling material filling the structure; heat-treating the structure to chemically bond the first material to the upper portions of the plurality of guide blocks; removing the sacrificial material and excess first material to form a first material cap chemically bonded to the upper portions of the plurality of guide blocks; and filling the structure with the filling material.

Method of forming structure including micropattern, method of forming nanopattern, and method of manufacturing display panel for liquid crystal display

Growing community of inventors

Suwon-si, South Korea

Xie Lei