East China University of Science and Technology

Xiaoyun Liu

Jian Xu

Zhe Zhang

Zeyang Wu

Xiaohan Wu

Lihui Li

Qixin Zhuang

Wentao Wang

The disclosure relates to the field of electronic materials, and in particular to a composite film of fluorinated polybenzoxazole (6FPBO) and triple-shelled mesoporous silica hollow spheres, and to its preparation and use. The composite film comprises fluorinated polybenzoxazole as a matrix and amino-functionalized triple-shelled mesoporous silica hollow spheres which are dispersed in the fluorinated polybenzoxazole matrix. A mass ratio of (amino-functionalized triple-shelled mesoporous silica hollow spheres)/(fluorinated polybenzoxazole) is 1/100 to 5/100. The composite film has excellent thermal stability and a lower dielectric constant.

Composite film of 6FPBO and triple-shelled mesoporous silica hollow spheres and its preparation and use

Growing community of inventors

Shanghai, China

Xiaoyun Liu