Harbin Institute of Technology

Xiaoyu You

Jian Liu

Chenguang Liu

Zijie Hua

This application relates to optical precision measurement and provides a dark-field confocal microscopy measurement apparatus based on vortex interference. A vortex light generation module is configured to generate vortex light with a predetermined order. A vortex light interference module is configured to: divide the vortex light into reference light and imaging light, direct the imaging light to irradiate a scanning position of a to-be-measured sample, to obtain sample reflection light of the scanning position, and enable the reference light and the sample reflection light to overlap and interfere with each other to obtain interference light. A rotation demodulation module is configured to perform rotation demodulation on the interference light, to obtain amplitude and phase information of the scanning position, so as to characterize the amplitude and phase information of defects and realize detection of phase-type defects.

Dark-field confocal microscopy measurement apparatus based on vortex interference

This application relates to the technical field of confocal microscopy measurement and provides a dark-field confocal microscopy measurement apparatus and method based on time-varying fractional-order vortex demodulation. The apparatus includes a time-varying modulated illumination module, an optical scanning module, a signal collection and demodulation module, a function generator, and a sample platform. The function generator is separately connected with. The time-varying modulated illumination module is configured to emit fractional-order vortex light to the optical scanning module. The optical scanning module is configured to transmit the fractional-order vortex light to the to-be-measured sample on the sample platform and transmit a reflected light signal to the signal collection and demodulation module. The signal collection and demodulation module is configured to collect the reflected light signal, and perform dark-field confocal detection on the reflected light signal based on a reference signal, to obtain measurement information of the to-be-measured sample.

Dark-field confocal microscopy measurement apparatus and method based on time-varying fractional-order vortex demodulation

This application provides a vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation. An opposite-order vortex beam generation module is configured to generate a mixed vortex beam, a sample scanning module is configured to irradiate a scanning position of a to-be-measured sample by using the mixed vortex beam, to obtain a sample reflection beam. A spiral transformation module is configured to spatially separate the sample reflection beam to obtain spatially separated beams. A multi-order detection module is configured to detect the spatially separated beams to obtain a vortex dichroism signal at the scanning position. When the scanning position of the to-be-measured sample is defect-free, the vortex dichroism signal is zero. Conversely, when defects are present at the scanning position, the vortex dichroism signal is non-zero. The positive and negative the vortex dichroism signal respectively correspond to the left-handed and right-handed chirality of the defects.

Growing community of inventors

Harbin, China

Xiaoyu You