Xidian University

Xiaoyan Tang

Yuming Zhang

Chao Han

Hao Yuan

Qingwen Song

A junction barrier schottky (JBS) diode is provided and includes: a bottom metal layer, a N-type substrate layer and a N-type epitaxial layer sequentially arranged in that order from bottom to top, P-type ion injection regions are disposed on an upper surface of the N-type epitaxial layer, distances of the P-type ion injection regions are gradually increased along a direction from an edge to a center of the JBS diode; an isolation dielectric layer is arranged on a periphery of the upper surface of the N-type epitaxial layer, an top metal layer is arranged on the upper surface of the N-type epitaxial layer and an upper surface of the isolation dielectric layer and further is in contact with the P-type ion injection regions. The JBS diode can effectively inhibit an occurrence of local electromigration and improve a device reliability.

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Xi'an, China

Xiaoyan Tang