Seiko Epson Corporation

Xiaoxing Wang

Kazuya Kitada

Koji Sumi

Chikara Kojima

Takayuki Yonemura

Tetsuya Isshiki

Yasuhiro Itayama

A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.

Piezoelectric element and piezoelectric element-based device

A piezoelectric material is expressed as a mixed crystal including a first component formed of a complex oxide having a perovskite structure and a rhombohedral structure and containing Bi in an A-site and Fe in a B-site, a second component formed of a complex oxide having a perovskite structure and a tetragonal structure and containing Ba in an A-site and Ti in a B-site, and a third component formed of a complex oxide having a perovskite structure and a tetragonal structure and containing Bi and K in an A-site and Ti in a B-site.

Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus

A piezoelectric element is provided. The piezoelectric element includes a piezoelectric layer made of a perovskite compound containing sodium, potassium, lithium, niobium and tantalum and bismuth manganate. The piezoelectric element may also include electrodes for applying a voltage to the piezoelectric layer. The piezoelectric layer may contain 0.25 to 1 mol % of bismuth manganate relative to the perovskite ceramics.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric elementincludes a first electrode, a piezoelectric layerwhich is provided on the first electrode, and a second electrodewhich is provided on the piezoelectric layer, and the piezoelectric layer is made of a piezoelectric material expressed as a mixed crystal including a first component formed of a complex oxide containing Bi and Fe and having a rhombohedral perovskite structure and a complex oxide containing Ba and Ti and having a tetragonal perovskite structure, a second component formed of a complex oxide containing Bi, K, and Ti and having a tetragonal perovskite structure, and a third component formed of a complex oxide containing Bi, Mg, and Ti and having a rhombohedral perovskite structure.

Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, actuator, sensor, and piezoelectric material

A piezoelectric element comprises a piezoelectric layer made of a perovskite compound containing sodium, potassium, lithium, niobium and tantalum and bismuth manganate and electrodes for applying a voltage to the piezoelectric layer.

A liquid ejecting head includes a piezoelectric element including a first electrode, a seed layer provided on the first electrode and containing BiFeOwith (001) plane preferential orientation, a piezoelectric layer provided on the seed layer and containing a perovskite-structure (Bi, Nd)(Fe, Mn, Al)Ocomposition with (001) plane preferential orientation, and a second electrode provided on the piezoelectric layer.

Liquid ejecting head and liquid ejecting apparatus using the same

A liquid ejecting head for discharging liquid from nozzle openings is provided. The liquid ejecting head includes a piezoelectric film and piezoelectric element with electrodes on the piezoelectric film. The piezoelectric film includes barium titanate-based composition having a perovskite structure containing barium, titanium, and copper less than or equal to 3 mol % of titanium amount.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

A piezoelectric element includes a piezoelectric layer, and an electrode provided to the piezoelectric layer. The piezoelectric layer is configured of a complex oxide having a perovskite structure containing potassium, sodium, and bismuth, niobium, iron, and chromium.

A liquid ejecting head for discharging liquid from nozzle openings is provided. The liquid ejecting head includes a piezoelectric element comprising a piezoelectric film inserted between electrodes with buffer layer on one or two surfaces of the piezoelectric film, wherein the piezoelectric film is made from barium titanate-based composition having a perovskite structure containing barium, titanium as well as copper equal to or less than 3 mol % of titanium amount, lithium more than or equal to 2 mol % and less than or equal to 5 mol % of titanium amount, and boron more than or equal to 2 mol % and less than or equal to 5 mol % of titanium amount and the buffer layer is formed from a complex oxides with perovskite structure containing bismuth, iron, manganese, barium and titanium.

Liquid ejecting head, liquid ejecting apparatus and piezoelectric element

Provided is a method of manufacturing a liquid ejecting head including a pressure generating chamber communicating with a nozzle opening and a piezoelectric element including a piezoelectric layer and an electrode, the method including: forming a first piezoelectric precursor film containing Bi and Fe, or Ba and Ti; forming a first piezoelectric layer by heating and crystallizing the first piezoelectric precursor film; forming a second piezoelectric precursor film further containing at least one selected from Li, B, and Cu on the first piezoelectric layer, in addition to Bi and Fe, or Ba and Ti contained in the first piezoelectric precursor film; and forming the piezoelectric layer by heating and crystallizing the first piezoelectric layer and the second piezoelectric precursor film.

Method of manufacturing liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric element

A liquid ejecting head includes a pressure generating chamber communicating with a nozzle for ejecting liquid droplets and a piezoelectric element having a piezoelectric layer and a pair of electrodes disposed on both sides of the piezoelectric layer. The piezoelectric layer is made of a perovskite-type oxide containing barium titanate, calcium titanate, and europium oxide.

A method for manufacturing a piezoelectric film element includes foursteps. The first is to form a bottom electrode on a Si substrate. The second is to form a seed layer with a layered perovskite structure on the bottom electrode. The third is to form a BiTiO&#x2014;BaBiTiObased piezoelectric film on the seed layer. The final step is to form an top electrode on the piezoelectric film.

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Chino, Japan

Xiaoxing Wang