Huawei Technologies Co., Limited

Xiaoshi Dong

Jun Feng

Fengpei Sun

Jinghui Xu

Tenghao Li

Zhihong Feng

Zhiwu Chang

Kui Ouyang

Luo Han

Huai Yuan Chu

An electrostatic MEMS micromirror is provided, and may be used in a device such as a mobile phone, a microphone, a camera, a radar, or an optical switch. The electrostatic MEMS micromirror includes a support beam, a micromirror, and a drive component. The drive component includes a comb frame and a drive comb located in the comb frame. The support beam and the micromirror are mechanically coupled using the comb frame. Two sides of the comb frame that are mechanically coupled to the micromirror are separately located on two sides of a rotating axis determined by the support beam. The drive comb includes at least one comb pair. The comb pair includes a movable comb structure and a stationary comb structure. The movable comb structure includes a plurality of movable combs. One end of the movable comb is fastened to the comb frame.

Electrostatic MEMS micromirror

An MEMS chip includes a substrate, a movable assembly, a fastening assembly, and a drive assembly. The fastening assembly is located between the substrate and the movable assembly. The movable assembly includes a fastening portion, a movable portion, and a first support beam. The first support beam is connected to the movable portion and the fastening portion. A first avoidance slot is disposed on a face that is of the movable portion and that faces the fastening assembly. The fastening assembly is grounded. A boss and a first position limiting pole are disposed on a face that is of the fastening assembly and that faces the movable assembly. The boss is connected to the fastening portion and configured to support the fastening portion. The first position limiting pole corresponds to the first avoidance slot. The drive assembly is connected to the movable portion to drive the movable portion to move.

MEMS chip, manufacturing method thereof, MEMS device, and electronic device

This application provides a tunable optical add/drop multiplexer T-OADM. A beam adjustment apparatus changes an incident angle at which an incident beam is emitted onto an optical filter. After the optical filter splits the incident beam into a transmitted beam and a reflected beam, the beam adjustment apparatus further adjusts a transmission direction of the transmitted beam emergent from the optical filter and a transmission direction of the reflected beam emergent from the optical filter, so that the transmitted beam and the reflected beam are output to corresponding ports, so as to implement a flexible and controllable T-OADM apparatus. This application may be applied to the optical communication field, for example, may be used to implement add/drop multiplexing of tributary signals in an optical domain in fields such as a long-haul backbone and a metropolitan area network.

Tunable optical add/drop multiplexer

Growing community of inventors

Shenzhen, China

Xiaoshi Dong