North University of China

Xiaorui Liang

Qiulin Tan

Jijun Xiong

Wendong Zhang

Lei Zhang

Xiangrong Li

Shuang Li

Dan Hu

The present disclosure discloses a surface acoustic wave temperature sensor and a manufacturing method thereof. The surface acoustic wave temperature sensor includes a sensing module and an antenna module electrically connected to each other. The antenna module includes a first high-temperature-resistant substrate and a patterned antenna formed on a surface of the first high-temperature-resistant substrate, a recess is formed in a first surface of the first high-temperature-resistant substrate, and the sensing module is fixed in the recess. The sensing module and the antenna module of the surface acoustic wave temperature sensor provided by the present disclosure form a whole. Therefore, compared with the prior art, the volume is greatly reduced, and wireless passive temperature monitoring in a high-temperature and narrow space can be better implemented. Moreover, the sensing module can be integrated in the antenna module, and such a structure is more convenient for batch processing.

Manufacturing method for a surface acoustic wave temperature sensor

An apparatus and method for real-time in-situ simultaneous measurement of temperature and mechanical parameters can include a charge type vibration sensing module having a temperature compensation function and a temperature/vibration coplanarly-integrated wireless surface acoustic wave (SAW) sensing module are controlled by a processing module in which a full-range temperature-vibration composite parameter compensation decoupling method is implanted, which can detect a vibration signal in a variable temperature environment. Moreover, temperature and vibration multi-parameter testing of static components in a high-temperature, narrow and closed environment can be implemented by arranging the charge type vibration sensing module having a temperature compensation function, and the temperature/vibration coplanarly-integrated wireless SAW sensing module implements health monitoring of moving components in a high-temperature and high-rotation environment.

Apparatus and method for real-time in-situ simultaneous measurement of temperature and mechanical parameters

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Taiyuan, China

Xiaorui Liang