Applied Materials, Inc.

Xiaoqun Zou

Jeong Jin Hong

Sejune Cheon

Sang Hong Kim

Mikyung Shim

Jinkyeong Lee

Tao Zhang

Venkata Ravishankar Kasibhotla

Bala Shyamala Balaji

A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. Generating the summary data includes identifying a steady state and transient portion of the trace sensor data and generating a first and second portion of summary data based on the steady state and transient portions. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

Diagnostic tool to tool matching methods for manufacturing equipment

A method includes receiving trace sensor data associated with a first manufacturing process of a processing chamber. The method further includes processing the trace sensor data using one or more trained machine learning models that generate a representation of the trace sensor data, and then generate reconstructed sensor data based on the representation of the trace sensor data. The method further includes comparing the trace sensor data to the reconstructed sensor data. The method further includes determining one or more differences between the reconstructed sensor data and the trace sensor data. The method further includes determining whether to recommend a corrective action associated with the processing chamber based on the one or more differences between the trace sensor data and the reconstructed sensor data.

Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment

A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.

Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment

A method includes receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber. The method further includes receiving simulated sensor data generated by a trained physics-based model. The method further includes determining which one or more components of the manufacturing chamber contribute to a difference between the first sensor data and the simulated sensor data. The method further includes causing performance of a corrective action in view of the difference.

Diagnostic methods for substrate manufacturing chambers using physics-based models

A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

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Danville, CA, United States of America

Xiaoqun Zou