General Electric Company

Xiaoping Qian

Kevin George Harding

Joseph Benjamin Ross

Russell Stephen DeMuth

Qingying Hu

A method for generating a mask for use with a light measurement system that includes a light source for projecting light onto a surface of an object, and an imaging system for receiving light reflected from the surface of the object. The method includes determining a profile of the object to be inspected, and generating a mask based on the determined profile, wherein the mask includes an opening extending therethrough that has a profile that substantially matches a profile of the object as viewed from the light source.

Methods and apparatus for generating a mask

A method for inspecting an object using a structured light measurement system that includes a light source for projecting light onto a surface of the object and an imaging sensor for receiving light reflected from the object. The method includes determining a position of at least one of the light source and the imaging sensor with respect to the object based on at least one of a three-dimensional model of the object and a three-dimensional model of the structured light measurement system.

Methods and apparatus for inspecting an object

The present disclosure provides for an optical metrology system for scanning an object () having a shiny surface. The optical metrology system includes at least one light source () configured and adapted to emit a structured light pattern (L) against the surface of the object, at least one first polarizer () disposed between the light source and the object such that the light pattern passes therethrough, the first polarizer being configured and adapted to vary at least one of the plane of polarization and the polarization angle of the light pattern, at least one camera () configured and adapted to take images of the object, and at least one second polarizer disposed between the camera and the object, the second polarizer having a fixed orientation.

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Clifton Park, NY, United States of America

Xiaoping Qian