Melexis Technologies Nv

Xiaoning Jia

Roeland Baets

Wouter Leten

Joris Roels

A gas sensor device () is configured to measure a predetermined gas of interest and comprises an enclosure () comprising a semiconductor substrate () and defining a first cavity (), an optically transmissive second closed cavity () and a third cavity (). The second cavity () is interposed between the first and third cavities (). The first cavity () comprises an inlet port () for receiving a gas under test, an outlet port () for venting the gas under test. The first cavity () also comprises an optical source () and a measurement sensor (). The second cavity () is configured as a gaseous filter comprising a volume of the gas of interest sealingly disposed in the second cavity (), and the third cavity () comprises a reference measurement sensor () disposed therein.

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Ghent, Belgium

Xiaoning Jia