Chinese Academy of Sciences

Dongfang Jingyuan Electron Limited

Xiaomei Wu

Yu Zhang

Min Yang

Zhaoli Zhang

Weimin Ma

Xiaomin Dou

A method for managing defects for an augmented automatic defect classification (ADC) process is disclosed. The method includes receiving a defect record based on an inspection of a target specimen; extracting, from a design database, relevant design data associated with a patch surrounding a location of a defect from the defect record; performing, by a processor, lithographic simulation on the relevant design data associated with the patch to determine a context patch; comparing, by the processor, the context patch with an image of the defect from the defect record to determine whether there exists a match between the context patch and the image of the defect; and defining the defect as a systematic defect based on a determination that there exists a match between the context patch and the image of the defect.

Augmented automatic defect classification

The invention provides a composite metal oxide adsorbent for fluoride removal and the preparation method thereof. Said composite metal oxide adsorbent for fluoride removal comprises: 0.05-0.15 molar parts of transition metal, 0.2-0.6 molar parts of Al and/or Mg, and 0.05-0.15 molar parts of rare earth metal. The composite metal oxide adsorbent for fluoride removal has a saturation adsorption capacity on fluorine in water of up to 229 mg/g, under a neutral condition.

Composite metal oxide adsorbent for fluoride removal

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Beijing, China

Xiaomei Wu