Johnson & Johnson Medical Gmbh

Ethicon, Gmbh

Other

Applied Materials, Inc.

Advanced Sterilization Products

Xiaolan Chen

Szu-Min Lin

Paul Taylor Jacobs

Charles G Roberts

Peter C Zhu

Steven Roy Julien Brueck

Marian Mankos

Andres Fernandez

Harold R Williams

Steven Thomas Coyle

Paul C Allen

Douglas Earl Holmgren

Robert M Spencer

Richard Jed Kendall

Michael Hahs

Samuel C Howells

Janusz S Wilczynski

Timothy N Thomas

Ming Lun Yu

Jeffrey S Sullivan

Saleem H Zaidi

Windsor Owens

Mark A Gesley

Andrew Frauenglass

Toby A Soto

Allan L Sagle

David Feld

Tim Thomas

Methods and a device for removing aldehydes from a waste stream are disclosed. In a preferred embodiment, the device provides for and the method uses a chemical or an aminated surface having primary amine functionality resulting from the amination of a support material such as silica.

Method of use for aldehyde removal

Device and method of use for aldehyde removal

A photocathode as a source of electron beams, having a substrate of optically transmissive diamond and a photoemitter. A photocathode with a single emitting region provides a single electron beam; a photocathode with multiple emitting regions provides multiple electron beams. The photoemitter is positioned on the side of the diamond substrate opposite the surface on which the illumination is incident, and has an irradiation region at the contact with the optically transmissive diamond, and an emission region opposite the irradiation region, these regions being defined by the path of the illumination. The diamond substrate at the irradiation region/emission region interface conducts heat away from this focused region of illumination on the photocathode. Alternately, a diamond film is used for heat conduction, while another material is used as a substrate to provide structural support. The thermal conductivity of diamond is at least three orders of magnitude greater than that of fused silica, which is an alternative substrate material for photocathodes. This allows for efficient conduction of heat away from the irradiation region/emission region interface, and therefore allows higher currents to be achieved from the photocathode. This, in turn, permits higher throughput rates in applications including electron beam lithography.

Diamond supported photocathodes for electron sources

An electron beam lithography system includes a laser for generating a laser beam, and a beam splitter for splitting the laser beam into a plurality of light beams. The intensity of the light beams is individually modulated. The light beams are of sufficient energy such that, when they impinge on a photocathode, electrons are emitted. Modulation of the light beams controls modulation of the resulting electron beams. The electron beams are provided to an electron column for focusing and scanning control. Finally, the electron beams are used to write a scanning surface, for example, using an interlaced writing strategy.

Multiple electron beam lithography system with multiple beam modulated laser illumination

Methods, compositions, and devices for alleviating the problems of toxic discharge of aldehydes present in waste streams are disclosed. The methods relate to reducing neutralized aldehydes wherein the neutalized aldehydes are formed by treating aldehydes with amino acids and thereinafter are reduced. These reduced, neutralized aldehydes do not revert back to toxic aldehydes, but form amino acids and thus allow waste containing aldehyde to be more environmentally safely disposed.

Reductive amination for aldehyde neutralization

A lithography apparatus including both a laser beam source and an electron beam column, where the electron beam column has a support(in one embodiment a window in the column housing) having an index of refraction n. The support, having a photocathode source material disposed on its remote surface, is located in some embodiments such that the internal angle of the incident laser beam is &thgr; with respect to a line perpendicular to the remote surface. The numerical aperture of the substrate(equal to nsin &thgr;) is greater than one in one embodiment, resulting in a high resolution spot size diameter incident on the photocathode source material at the remote surface. Incident energy from the laser beam thereby emits a corresponding high resolution electron beam from the photocathode source material. Electromagnetic lens components are disposed downstream in the electron beam column to demagnify the electron beam. This apparatus allows the continuously decreasing minimum feature dimension sizes for semiconductor electron beam lithography.

Electron beam column using high numerical aperture photocathode source illumination

Methods and a system of using amino acids are disclosed as being useful in neutralizing aldehydes in waste. These neutralizers allow waste containing aldehyde to be more safely and cheaply disposed.

Aldehyde neutralizer

The present invention involves the use of pupil plane filters to enhance optical imaging for both lithography and microscopy. The present invention includes numerous pupil plane filter strategies for enhancing optical lithography. A square pupil plane filter suitably restricts the imaging to a nearly diffraction limited regime. Moreover, pupil plane filters are suitably used in off-axis illumination (OAI) and imaging interferometric lithography (ILL). The techniques of OAI and ILL along with the use of pupil-plane filters are applicable in, for example, any diffraction-limited situation where the limit is imposed by the characteristics of the optical system rather than the transmission medium and where the illumination system is under the control of the experimenter.

Method and apparatus for improving pattern fidelity in diffraction-limited imaging

The present invention provides methods and apparatus for defining a single structure on a semiconductor wafer by spatial frequency components whereby some of the spatial frequency components are derived by optical lithography and some by interferometric lithographic techniques. Interferometric lithography images the high frequency components while optical lithography images the low frequency components. Optics collects many spatial frequencies and the interferometry shifts the spatial frequencies to high spatial frequencies. Thus, because the mask does not need to provide high spatial frequencies, the masks are configured to create only low frequency components, thereby allowing fabrication of simpler masks having larger structures. These methods and apparatus facilitate writing more complex repetitive as well as non-repetitive patterns in a single exposure with a resolution which is higher than that currently available using known optical lithography alone.

Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns

A system to deliver gas/vapor from solid materials. Specifically, the delivery system for the use of gas or vapor released from a solid material, such as a non-aqueous/solid hydrogen peroxide complex. The system is comprised of a delivery system that is configured to receive a plurality of disks containing the solid material and provide these disks into an injector. The injector heats the disks to produce a gas or vapor that is then provided into a chamber. The sterilization process can be done by gas or vapor alone, or in combination with plasma or ultra violet radiation. In particular, a control system automatically induces the delivery system to provide the injector with a disk and then remove the disk once the injection sequence is complete.

Gas/vapor delivery from solid materials

Method of releasing gas or vapor from a solid material

Sterilization system and method

Material that is to be used in wrapping medical items or in making gowns, drapes, and the like is treated with silicone to make it liquid repellent. The material, after being sterilized by an oxidizing plasma process, still retains its repellency.

Liquid repellant silicone-treated gas-permeable material for

A method of making an inorganic salt-hydrogen peroxide complex includes the following steps: (a) mixing the inorganic salt with sufficient water for a time sufficient to form a soft paste, (b) mixing the paste with an aqueous hydrogen peroxide solution to form a hydrogen peroxide-containing paste, and (c) drying the hydrogen peroxide-containing paste. A hydrate method of making Na.sub.4 P.sub.2 O.sub.7.3H.sub.2 O.sub.2 includes the steps of: mixing sodium pyrophosphate decahydrate solid with an aqueous solution of hydrogen peroxide having a concentration of less than 30%, and drying the mixture. Compositions of matter include K.sub.2 HPO.sub.4.3H.sub.2 O.sub.2, KH.sub.2 PO.sub.4.H.sub.2 O.sub.2 Ca.sub.2 P.sub.2 O.sub.7.nH.sub.2 O.sub.2, Ca.sub.2 P.sub.2 O.sub.4.nH.sub.2 O.sub.2, Na.sub.2 SO.sub.4.nH.sub.2 O.sub.2, K.sub.2 SO.sub.4.nH.sub.2 O.sub.2, Na.sub.2 SiO.sub.3.nH.sub.2 O.sub.2 and Na.sub.2 SiO.sub.7.nH.sub.2 O.sub.2.

Hydrogen peroxide complexes of inorganic salts and synthesis thereof

An apparatus and process for hydrogen peroxide vapor sterilization of medical instruments and similar devices make use of hydrogen peroxide vapor released from an inorganic hydrogen peroxide complex. The peroxide vapor can be released at room temperature and atmospheric pressure; however, the pressure used can be less than 50 torr and the temperature greater than 86.degree. C. to facilitate the release of hydrogen peroxide vapor. Preferred hydrogen peroxide complexes for use in the invention include Na.sub.4 P.sub.2 O.sub.7.3 H.sub.2 O.sub.2 and KH.sub.2 PO.sub.4.H.sub.2 O.sub.2. The heating rate can be greater than 5.degree. C. Optionally, a plasma can be used in conjunction with the vapor.

Vapor sterilization using inorganic hydrogen peroxide complexes

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Irvine, CA, United States of America

Xiaolan Chen