Beijing Naura Microelectronics Equipment Co., Ltd.

Beijing Tsinghua Changgung Hospital

Shenzhen People's Hospital

Xiaojuan Wang

Chun Long Wang

Xin Wu

Bo Zheng

Jing Shi

Zhenguo Ma

Jing Wang

Peijun Ding

Jiahong Dong

Chengquan Li

Xiaobin Feng

Meilong Wu

Liping Liu

Tianchong Wu

Shizhong Yang

Linsen Liu

Yusen Zhang

An acquisition method and system for clinical experimental data, an electronic device, and a storage medium are provided, which relate to the field of data processing technologies, the method includes: extracting first clinical experimental data from a target information system based on a preset clinical experimental data extraction model; acquiring and labeling speech input data and manual input data of a target user to obtain second clinical experiment data; recognizing to —be-extracted clinical experimental data based on a preset character recognition model to obtain third clinical experimental data; organizing and arranging the three clinical experimental data in chronological order and weight to generate ultimate clinical experimental data. Thus, problems of difficulty in connectivity and high error rate caused by inability to integrate various acquisition methods for clinical experimental data are solved, multimodal data extraction and automatic information quality proofreading are implemented based on integrating various acquisition methods for clinical experimental data.

Acquisition method and system for clinical experimental data, electronic device, and storage medium

Embodiments of the present disclosure provide a reaction gas supply system and a control method. The reaction gas supply system includes a plurality of precursor containers and a plurality of supply regulator devices. The precursor container is connected to at least one of the reaction chambers. The plurality of precursor containers include at least a pair of precursor containers of an arbitrary combination. A supply regulator device is arranged between each pair of precursor containers. The supply regulator device is configured to connect the corresponding pair of precursor containers. With the reaction gas supply system and the control method of the present disclosure, the reaction gas may be ensured to be supplied stably, the utilization rate of the precursor may be increased, and the production efficiency and the product quality may be increased.

Reaction gas supply system and control method thereof

A semiconductor manufacturing process is provided. A trench is formed in a semiconductor structure and an oxide layer is deposited on sidewalls of the trench. A solid-state by-product layer is formed on surfaces of the trench by introducing a first etchant gas to react with a naturally occurred oxide layer at the bottom of the trench and the deposited oxide layer. The solid-state by-product layer has a thickness on the bottom less than a thickness on the sidewalls. A second etchant gas is introduced into the trench to react with the solid-state by-product layer, thereby providing a thinned solid-state by-product layer on the sidewalls to protect the deposited oxide layer. By a heating process, the thinned solid-state by-product layer is removed from the sidewalls of the trench, exposing the deposited oxide layer and a surface portion of the semiconductor structure in the trench.

Semiconductor manufacturing process

Growing community of inventors

Beijing, China

Xiaojuan Wang