Lanzhou Institute of Chemical Physics, Cas

Xiaohong Liu

Jianmin Chen

Huidi Zhou

Hongxuan Li

Yang Yang

Li Ji

The present disclosure relates to a preparation method of a niobium diselenide (NbSe) film with ultra-low friction and low electrical noise under sliding electrical contact in vacuum. The method uses a direct current (DC) closed field magnetron sputtering method for preparation. Through process design of low deposition pressure and low sputtering energy, on one hand, a purity of an NbSesputtered product is kept, generation of interference phases such as NbSeis avoided, and electrical conductivity of the sputtered NbSefilm is greatly improved, and on the other hand, a nanocrystalline/amorphous superlattice composite structure is formed, and excellent mechanical and lubricating properties are achieved. Under sliding electrical contact in vacuum, compared with those of a common electroplated gold coating, a friction coefficient of the film is reduced to 0.02 from 0.25, a wear life is prolonged by at least 7 times, and the electrical noise is reduced by about 50%.

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Gansu, China

Xiaohong Liu