Other

Princeton University

Nanonex Corporation

Xiaogan Liang

Stephen Y Chou

Ying Wang

Yixing Liang

The present invention provides methods and apparatus that can manipulate, detect, and/or analyze single molecules, single small particles or single small samples of matter passing through a nanoscale gap within a nanofluidic channel of a detector.

Electronic detectors inside nanofluidic channels for detection, analysis, and manipulation of molecules, small particles, and small samples of material

The present invention provides methods and apparatus for measuring a property of an sample, the apparatus can manipulate, detect, and analyze the sample composed of single molecules, single small particles or single small samples of matter by drawing the sample into a nanofluidic channel and stretching the sample within the channel, passing the stretched sample through a gap having a width of less than or equal to 20 nm of a nanogap detector positioned inside or adjacent to the nanofluidic channel and measuring an output from the nanogap detector representative of the property of the sample.

Nanogap electronic detector for measuring properties of a biomolecule stretched in a nanochannel, and method thereof

A method and apparatus for performing nanoimprint lithography. When an electric field is applied between the mold and the substrate, various forces can be generated among molds, substrates, and resists. The electrostatic force between the mold and the substrate can serve as an imprinting pressure to press the structured mold into the conformable resist. In addition, the electric field induces additional wetting forces (electrowetting or dielectrophoresis) in a liquid resist, which can assist the flow and filling of the liquid resist into fine structures.

Method and apparatus of electrical field assisted imprinting

In accordance with the invention, a lateral dimension of a microscale device on a substrate is reduced or adjusted by the steps of providing the device with a soft or softened exposed surface; placing a guiding plate adjacent the soft or softened exposed surface; and pressing the guiding plate onto the exposed surface. Under pressure, the soft material flows laterally between the guiding plate and the substrate. Such pressure induced flow can reduce the lateral dimension of line spacing or the size of holes and increase the size of mesas. The same process also can repair defects such as line edge roughness and sloped sidewalls. This process will be referred to herein as pressed self-perfection by liquefaction or P-SPEL.

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Plainsboro, NJ, United States of America

Xiaogan Liang