Lucis Technologies Holdings Limited

Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Xiaofeng Yuan

Steven Paul Gutteridge

Qiang Wu

Shan Guan

A method for assembling a microlens array assembly including a set of microlens array elements having at least two array elements having a first array element and a second array element includes adsorbing the first array element using a mobile platform, adsorbing the second array element using a fixture platform, coarsely aligning the second array element with the first array element based on edges of the second array element and edges of the first array element, finely aligning the second array element with the first array element based on an array pattern of the second array element and an array pattern of the first array element, and attaching the second array element to the first array element. The method enables assembling of multiple microlens array elements.

Method and apparatus for assembling multilayer microlens array elements

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Shanghai, China

Xiaofeng Yuan