Beihang University

Langfang Zhichi Power Technology Ltd.

Xiaoda Cao

Wenbin Wang

Zhi Tao

Yanxin Zhai

Kaiyun Zhu

Haiwang Li

Tiantong Xu

Weidong Fang

Kaibo Lei

Hanxiao Wu

Xiao Lin Zhang

Xiao Zhang

Yang Feng

Wensong Xiao

Zhiyang Wang

Murun Li

Hengyi Wang

Yuying Wu

Di An

Jiamian Sun

Haonan Lu

Chunhui Yang

Disclosed is an ultra-micro voice coil motor based on Micro-Electro-Mechanical System (MEMS) three-dimensional coil. The ultra-micro voice coil motor based on MEMS three-dimensional coil comprises a yoke, where an accommodating cavity is formed in the yoke, and a tongue is arranged in the accommodating cavity of the yoke; and two permanent magnets symmetrically arranged at a top and a bottom of the accommodating cavity; the three-dimensional coil is provided with an iron core slot, and the tongue of the yoke passes through the iron core slot to be in clearance fit with the three-dimensional coil; one end of the yoke is provided with a baffle, same poles of two magnets face each other, and a stator of the voice coil motor is the three-dimensional coil or the yoke and the permanent magnets.

Ultra-micro voice coil motor based on micro-electro-mechanical system three-dimensional coil

Embodiments of the present application provide a MEMS solenoid transformer, comprising a silicon substrate, a soft magnetic core, a first solenoid and a second solenoid; wherein, the soft magnetic core is wrapped inside the silicon substrate, the silicon substrate is provided with a first spiral channel and a second spiral channel, and two opposite sides of the soft magnetic core respectively pass through a center of the first spiral channel and a center of the second spiral channel; the first solenoid and the second solenoid are respectively disposed in the first spiral channel and the second spiral channel. By disposing the soft magnetic core, the first solenoid and the second solenoid of the transformer inside the silicon substrate completely, the thickness of the silicon substrate is fully utilized, and the obtained transformer has a larger winding cross-sectional area and a higher magnetic flux, increasing the inductance value of the transformer.

MEMS solenoid transformer and manufacturing method thereof

Embodiments of the present application provides a MEMS solenoid inductor, including: a silicon substrate, a soft magnetic core, and a solenoid; wherein the soft magnetic core is wrapped inside the silicon substrate, the silicon substrate is provided with a spiral channel, the soft magnetic core passes through a center of the spiral channel, and the solenoid is disposed in the spiral channel. By disposing the soft magnetic core and the solenoid of the inductor inside the silicon substrate completely, the thickness of the silicon substrate is fully utilized, and the obtained inductor has a larger winding cross-sectional area and improved magnetic flux, which increases the inductance value of the inductor; at the same time, the silicon substrate plays a protective role on the soft magnetic core and the solenoid, the strength of the inductor is improved, and the good impact resistance is provided.

MEMS solenoid inductor and manufacturing method thereof

Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.

Capacitive pressure difference sensor with improved bonding and manufacturing method

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Haidian District, China

Xiaoda Cao