Boe Technology Group Co., Ltd.

Beijing Boe Optoelectronics Technology Co., Ltd.

Xiangjun Tian

Yan Chen

Xueyong Wang

Zhongyuan Sun

Zhi Hu Wang

Wei Guo

Ping Hu

Yifang Chu

Seiji Fujino

Biao Tian

Zhao Kang

Embodiments of the present invention provide a beam splitter, a laser generator and an excimer laser annealing apparatus, which relate to field of display technology, and reduce probability of pollution of the beam splitter to some extent and increase homogeneity of the laser beam that is passed through the beam splitter. The beam splitter includes a transmission region configured as a through-hole and a reflective region arranged at a periphery of the through-hole, wherein the through-hole is configured to be transmitted by a first laser beam that is received; and the reflective region is configured to reflect the first laser beam that is received. The beam splitter may be used in a laser generator to perform a scanning annealing process.

Beam splitter, laser generator and excimer laser annealing apparatus

A laser device is provided. The laser device includes: a laser tube having an opening in both ends thereof, and a fixing apparatus on at least one of the ends of the laser tube. The opening in at least one of the ends of the laser tube is sealed by the fixing apparatus. A movable assembly and a window are provided on the fixing apparatus. The window is movable relatively to the opening of the laser tube when being driven by the movable assembly, to change a transmission position of a laser light generated by the laser tube on the window.

Laser device

The embodiments of the present disclosure provide an optical device and an excimer laser annealing equipment. The optical device includes: a light source; a transparent window spaced apart from the light source by a distance; and an optical system disposed between the light source and the transparent window. The transparent window is configured such that emergent light of the light source is vertically incident onto the transparent window after passing through the optical system.

Optical device and excimer laser annealing equipment

A hydraulic jack includes an oil cylinder, an oil tank, and an oil storage barrel. The oil storage barrel includes a front portion and a back portion which are opposite to each other; an oil outlet of the oil cylinder is connected with an oil inlet at the front portion of the oil storage barrel by means of an oil inlet pipe; and an oil inlet of the oil tank is connected with an oil outlet at the front portion of the oil storage barrel by means of an oil outlet pipe, the oil inlet pipe and the oil outlet pipe are provided with switching valves for alternatively turning on the oil inlet pipe and the oil outlet pipe. A partition plate that is capable of moving along a barrel wall and an elastic telescoping member are provided inside the oil storage barrel.

Hydraulic jack

A pressing apparatus is disclosed. The pressing apparatus includes: a static pressing plate; a movable pressing plate opposing the static pressing plate and including a plurality of movable press-blocks; a pressure sensor provided in each respective movable press-blocks; a plurality of drive units provided corresponding to the plurality of movable press-blocks, each drive unit being connected with one movable press-block for driving the corresponding movable press-block; a control unit electrically connected with each drive unit and each pressure sensor, the control unit being configured to compare the detected pressure value from each pressure sensor with a predefined pressure value, and adjust the pressure value between the corresponding movable press-block and the static pressing plate by means of the corresponding drive unit based on the comparison result.

Pressing apparatus

A plasma generator, a plasma annealing device, a deposition crystallization apparatus and a plasma annealing process are disclosed. The plasma generator includes: a gas chamber; a gas intake member configured to introduce a gas into the gas chamber; a cathode and an anode that are configured to apply an electric field to the gas introduced into the gas chamber to ionize the gas into plasma; a cooling water circulation member configured to control a temperature of the plasma generator; and a plasma beam outlet disposed on a top face of the gas chamber. The plasma annealing device including the plasma generator can generate a plasma beam, which can be used in annealing to amorphous silicon and crystallize the amorphous silicon to polycrystalline silicon.

Plasma generator, annealing device, deposition crystallization apparatus and annealing process

The present disclosure relates to the field of liquid crystal display, and particularly to a frame seal structure on a substrate, a substrate, and a liquid crystal display device. The frame seal structure comprises a primary seal and an assembly process dummy seal. The assembly process dummy seal is formed in an area between the primary seal and an edge of the substrate, and consists of a plurality of sub-seals which are arranged discontinuously. The present frame seal structure is a novel frame seal structure which is proposed with respect to drawbacks of the process dummy seal during assembling with a VIF process in a liquid crystal display device with post spacers. By virtue of the novel frame seal, the peripheral region of the substrate will not be pressed airtight during assembling, so that the gas can be discharged, and poor sealing in a certain area is avoided. Thus the present disclosure can solve the problem of poor pressing of frame seal, particularly the problems like seal brush and seal narrow, and can be better adapted to the VIF process and improve the yield.

Growing community of inventors

Beijing, China

Xiangjun Tian