The Penn State Research Foundation

Xianghui Zeng

Darrell G Schlom

Joan M Redwing

Zi-Kui Liu

Xiaoxing Xi

Alexej Pogrebnyakov

Thin films of conducting and superconducting materials are formed by a process which combines physical vapor deposition with chemical vapor deposition. Embodiments include forming boride films, such as magnesium diboride, in high purity with superconducting properties on substrates typically used in the semiconductor industry by physically generating magnesium vapor in a deposition chamber and introducing a boron containing precursor into the chamber which combines with the magnesium vapor to form a thin boride film on the substrate.

Growing community of inventors

State College, PA, United States of America

Xianghui Zeng