Ford Global Technolgoies, LLC

Ford Motor Company Limited

Xia Zhang

Robert E Hetrick

Timothy Jay Potter

Michael Howard Parsons

Michael Raymond Rigley

William C Tang

Jonathan Edward Fleming

William Chris Vassell

David G McIntyre

William Martin Sheeran

A method for fabricating an adhesion-resistant microelectromechanical device is disclosed wherein amorphous hydrogenated carbon is used as a coating or structural material to prevent adhesive failures during the formation and operation of a microelectromechanical device.

Adhesion resistant micromachined structure and coating

An automotive fuel injector having a fluorine-coating amphorous hydronated carbon film coating to resist the formation of carbonaceous deposits thereon. The fluorine-coating amphorous hydronated carbon film is made in part form trifluoromethyltrimethylsilane. The coating helps the fuel injector resist coking or the growth of hard carbonaceous deposits. This reduction in coking and deposits improves the fuel economy and engine performance.

Carbonaceous deposit-resistant coating for fuel injectors

A process for the preparation of hermetically sealed electronically active microstructures involves the preparation of a plurality of microstructures and associated conductive paths and lead bond areas on a single wafer such that areas surrounding the microstructures are maintained in a planar condition. A second wafer having a plurality of microstructure-receiving cavities is placed atop the first wafer and fusion or anodically bonded. The microstructures are preferably connected to lead bond pads which lie outside the surround, the second wafer also having bond pad accessing through-holes to facilitate bonding electrical leads to the devices after sawing from the wafer. The lead-connected devices may be further encapsulated by injection molding, potting, or other conventional encapsulative packaging techniques.

Fabrication method for encapsulated micromachined structures

Method for fabricating adhesion-resistant micromachined devices

An engine component such as an intake or exhaust valve, or any other component near or within the combustion chamber, is coated with an amorphous hydrogenated carbon film coating to prevent the formation of carbonaceous deposits thereon. Methods for forming the film coating are also disclosed.

Carbonaceous deposit-resistant coating for engine components

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Canton, MI, United States of America

Xia Zhang