Motorola Corporation

Xi-Qing Sun

John Michael Parsey, Jr

Jenn-Hwa Huang

Ji-Hai Xu

Samuel L Coffman

A capacitive device includes a substrate ( ), a first electrode ( ) located over the substrate and a second electrode ( ) located over the first electrode, movable relative to the first electrode, and capacitively coupled to the first electrode. The device further includes a first control electrode ( ) located over the substrate and a second control electrode ( ) located over the first control electrode, movable relative to the first control electrode, and capacitively coupled to the first control electrode. The first and second control electrodes actuate the second electrode toward the first electrode.

Capacitive device and method of manufacture

A Micro-Electromechanical Systems (MEMS) device ( ) having conductively filled vias ( ). A MEMS component ( ) is formed on a substrate ( ). The substrate has conductively filled vias ( ) extending therethrough. The MEMS component ( ) is electrically coupled to the conductively filled vias ( ). The MEMS component ( ) is covered by a protective cap ( ). An electrical interconnect ( ) is formed on a bottom surface of the substrate ( ) for transmission of electrical signals to the MEMS component ( ), rather than using wirebonds.

Micro-electromechanical system device

A micro electromechanical switch is formed on a substrate using a microplatform structure suspended on a spring suspension. The spring suspension is attached on one end to an anchor structure and extends in a substantially octagonal direction over a signal line. The microplatform has a shorting bar positioned facing a gap in the signal line and an electrical corset is formed on the signal fine to form a capacitor structure which is electrostatically attractable toward a bottom electrode upon application of a selected voltage. The switch functions from DC to at least 50 GHz with an electrical isolation of 35 dB and an insertion loss of 0.5 dB at 20 GHz. The RF switch has applications in telecommunications including wireless communications.

Folded spring based micro electromechanical (MEM) RF switch

A Micro-Electromechanical System (MEMS) switch (,) having a single, center hinge (,) which supports a membrane-type electrode (,) on a substrate (,). The single, center hinge (,) has a control electrode (,) coupled to the substrate (,) by an anchor (,), a hinge collar (,), a set of hinge arms (,). The control electrode (,) has a shorting bar (,) coupled thereto and is electrically isolated from another control electrode (,), which is formed on the substrate (,). A travel stop (,) is positioned between the substrate and the control electrode (,). Another aspect of the present invention is a Single Pole, Double Throw (SPDT) switch (,) into which is incorporated the single, center hinge (,) and the travel stop (,).

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Gilbert, AZ, United States of America

Xi-Qing Sun