Berkin B.v.

Wouter Sparreboom

Joost Conrad Lötters

Remco John Wiegerink

Jarno Groenesteijn

Theodorus Simon Josef Lammerink

Meint Jelle De Boer

Henk-Willem Veltkamp

Jack Herman Van Putten

Qihui Yu

Egbert Jan Van Der Wouden

Mahdieh Yariesbouei

Miguel A Rodriguez Olguin

The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel

The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

Flow measurement system and method for determining at least one property of a medium

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Ruurlo, Netherlands

Wouter Sparreboom