Korea Research Institute of Standards and Science

Woon Song

Jae Wan Hong

Sang Jung Ahn

Jin Ho Choi

Byong Chon Park

Won Young Song

Joon Lyou

Seung Hun Baek

Ju Youb Lee

Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.

Substrate measurement apparatus with electron distortion unit

Growing community of inventors

Seoul, South Korea

Woon Song