Az Electronic Materials USA Corp.

Braggone Oy

WooKyu Kim

Mark O Neisser

David J Abdallah

PingHung Lu

Ruzhi Zhang

Ralph R Dammel

M Dalil Rahman

Francis Michael Houlihan

Hengpeng Wu

Ping-Hung Lu

Guanyang Lin

Huirong Yao

Douglas S McKenzie

Hong Zhuang

Zachary Bogusz

Allen G Timko

Douglas Mckenzie

The present invention relates to an underlayer composition comprising a polymer, an organic titanate compound and optionally a thermal acid generator, where the polymer comprises at least one fluoroalcohol group and at least one epoxy group. The invention also relates to a process for using this underlayer material as an antireflective coating composition and/or a hard mask for pattern transfer.

Underlayer composition and process thereof

A polymer comprising a siloxane polymer having at least one Si&#x2014;OH group and at least one Si&#x2014;OR group, where R is condensation stabilizing group optionally having a reactive functional group, wherein the siloxane polymer, when placed into a solvent, has a weight average molecular weight increase of less than or equal to 50% after aging for one week at 40&#xb0; C. as measured by GPC is provided.

Silicon-based antireflective coating compositions

The present invention relates to a composition comprising: where Ris a non-hydrolysable group and n is an integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful in forming low k dielectric constant materials and as well as hard mask and underlayer materials with anti-reflective properties for the photolithography industry.

Silicone coating composition

The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moeity in the backbone of the polymer. The invention further relates to a process for imaging the present composition.

Antireflective coating composition comprising fused aromatic rings

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Bridgewater, NJ, United States of America

WooKyu Kim