Average Co-Inventor Count = 9.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (1 from 3,785 patents)
2. Lam Research Corpporation (1 from 1 patent)
2 patents:
1. 12266542 - Atomic layer etching for subtractive metal etch
2. 11935758 - Atomic layer etching for subtractive metal etch