Samsung Electronics Co., Ltd.

Woocheol Jeong

Wilson Long

Kevin Tu

Beom Seok Kim

Young Hwan Son

Seong-Woo Kang

Bongjin Kuh

Tae-Yeon Hwang

Sunghwi Cho

Woosung Ha

Yun-Dik Han

A deposition system which is configured to enable improved temperature uniformity of a heated substrate may include a susceptor provided in a chamber to hold a substrate, a reflection housing provided outside the chamber, a heating module including light sources provided in the reflection housing, and a reflection control module provided in the reflection housing between the heat sources and the chamber. The reflection control module may be configured to reflect light, which propagates along a first trajectory from the light sources toward a center region of the substrate, to propagate along a second trajectory toward an edge region of the substrate, thereby providing improved substrate irradiance uniformity and thus improved substrate temperature uniformity. Improved substrate temperature uniformity may result in improved thickness uniformity of layers provided on the substrate in a deposition process.

Deposition system for forming thin layer

A disk drive that has an air deflector which deflects at least a portion of airflow away from an actuator arm assembly of the drive. The air flow is typically generated by a rotating disk of the disk drive.

Air razor and disk limiter for a hard disk drive

A hard disk drive that includes a wave stringer. The wave stringer can attenuate energy which propagates through a base plate of the disk drive. The wave stringer may be designed by initially analyzing propagation patterns of both acoustic and shock waves applied to the drive. The wave stringer is then designed, constructed and assembled to the disk drive to attenuate critical frequencies at weak points of the disk drive. The wave stringer may have a plurality of ribs designed to vary the mechanical impedance of the drive to attenuate the propagated energy.

Wave stringer for controlling acoustic noise and shock vibration in a storage device

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Santa Clara, CA, United States of America

Woocheol Jeong