Infineon Technologies Ag

Woo-Tag Kang

Rajeev Malik

Mihel Seitz

Jungwon Suh

Kil-Ho Lee

Method, apparatus, and article of manufacture for a diode defined by a portion of a gate layer of an integrated circuit. Illustrative, non-limiting embodiments of the invention are provided, including a temperature compensated DRAM, a temperature compensated CPU, a temperature compensated logic circuit and other on-chip temperature sensor applications.

Gate layer diode method and apparatus

A dynamic random access memory (DRAM) cell structure (and method for making a DRAM cell structure) that is more suitable than current DRAM structures for implementation in ever decreasing semiconductor fabrication geometries. The DRAM cell structure comprises a deep trench (DT) capacitor formed in a substrate. A recess is formed in the substrate proximate the deep trench capacitor. A gate is formed that extends into the recess but does not completely occupy the recess. A source is formed in the substrate in a region beneath the recess. A drain is formed in the substrate in a region laterally and vertically offset from the source. A channel between the source and drain is created beneath the gate along a side wall of the recess. Thus, the depth of the recess determines the length of the channel region. With this DRAM cell structure, it is easier to avoid the high doping concentration issue and the short channel effect. Consequently, this DRAM cell structure can be employed with smaller fabrication technologies.

Partially recessed DRAM cell structure

A silicon on insulator shaped structure formed to reduce floating body effect comprises a T-shaped active structure and a body contact for back bias. Etching a T-shape through two layers of oxide will form the T-shaped active areas. A back bias is formed when a metal line is dropped through the SOI structure and reaches a contact plug. This contact plug is doped with N+ or P+ dopant and is embedded in a Si substrate. The T-active shaped structure is used to reduce the short channel effects and junction capacitance that normally hinder the effectiveness of bulk transistors. The back bias is used as a conduit for generated holes to leave the SOI transistor area thus greatly reducing the floating effects generally associated with SOI structures.

Active SOI structure with a body contact through an insulator

A method for fabricating a self-aligned contact in an integrated circuit includes defining first spacer layers over the sidewalls of a pair of wordline stacks. An oxide layer is deposited over the tops of the wordline stacks, the first spacer layers and a surface of the substrate disposed between the first spacer layers. The oxide layer is removed from the first spacer layers, thereby forming a remaining oxide layer that covers the surface of the substrate disposed between the first spacer layers. Second spacer layers are formed over the first spacer layers, and which cover respective portions of the remaining oxide layer. The remaining oxide layer is removed to thereby form undercut regions. The undercut regions are substantially filled with contact material during formation of the contact.

Self-aligned contact formation using double SiN spacers

A method of manufacturing a transistor by using two layers of a silicon epitaxial layer is disclosed. In the first step of the manufacturing process, a spacer is formed around gate structures. Then, a first silicon epitaxial layer is grown on the wafer. Then, a second spacer is deposited and then etched, such that the second spacer remains around a gate structure. Next a second silicon epitaxial layer is grown on the first silicon epitaxial layer, and the second spacer is etched from around the gate structure. After etching the first oxide spacer, ions are implanted at a first energy level to form four junctions. Then a third spacer is deposited and etched, so that the third spacer remains around the gate structures. Then ions are implanted at a second energy level to form two more junctions, each of these two junctions being located between two of the earlier formed junctions. The junctions and the gate structures provide a transistor structure. The resulting transistor has a good short channel effect because the junction depths are preferably all aligned. It also has good drive current because the junctions created by ion implantation at a second energy level have low parasitic resistance.

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Woo-Tag Kang