Hyosung Corporation

Woo-Sik Jeong

Ik-Hyeon Kwon

Jang-Won Lee

Yong-Chul Park

Kwang-Chul Hyun

Jang-Won 106-404 Mugunghwa Hyoseong Apt Lee

Ik-Hyeon 306-502 Gangbyeon Raemian Apt Kwon

Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600&#xb0; C. for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.

Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite

Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent therefor. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of zeolite 3A, 4A or 5A which undergoes ion exchange and impregnation with alkali earth metal and is thermally treated at 150 to 600&#xb0; C. for 0.5 to 100 hours so as to be able to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.

Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite

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Woo-Sik Jeong