Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,611 patents)
2 patents:
1. 11735427 - Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor
2. 11222786 - Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device