Institute for Advanced Engineering

Woo-Kyeong Seong

Hyo-Jung Lee

A head/slider assembly is integrated with a track-following electrostatic micro actuator. A method for fabricating the head/slider assembly includes the steps of: forming a micro actuator structural layer on a slider substrate with a cavity formed therebetween; forming metal signal lines on the micro actuator structure layer; forming the read/write magnetic head on a central part of the micro actuator structure layer; etching to separate the micro actuator and the read/write magnetic head; and forming a protective cover on top of the micro actuator and the read/write magnetic head to form the head/slider assembly, to thereby make the assembly to allow it to be used in a HDD system of a very high track density having a track pitch of 1 .mu.m and a recording density of more than 10 Gb/in.sup.2.

Growing community of inventors

Kyoungki-Do, South Korea

Woo-Kyeong Seong