Samsung Electronics Co., Ltd.

Woo-Joung Kim

Sung-Hoon Kim

Hyang-Ja Yang

Chang-Bum Kim

An optical proximity correction (OPC) verifying method including checking a first location of a first pattern in a layout of a stacked memory device, calculating a shift value of the first pattern according to the first location, obtaining a difference value between the first location and a second location of a second pattern formed through an OPC with respect to the first pattern, and determining whether the OPC is to be performed again, based on the shift value and the difference value.

Stacked memory device, optical proximity correction (OPC) verifying method, method of designing layout of stacked memory device, and method of manufacturing stacked memory device

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Seoul, South Korea

Woo-Joung Kim