Samsung Electronics Co., Ltd.

Woo-hyuk Jang

Tae-Hyung Rhee

Sang-yun Yi

Tae-hyung Rhee

Jung-Hee Kim

Kwan-Soo Han

Eun-ji Kim

Eun-Ji Kim

Yong-woo Lee

Hyung-jae Lee

Byong-gwon You

Jung-hwan Cho

Byong-Gwon Yoo

The present invention discloses a polymer optical waveguide and a method of fabricating the same. The polymer optical waveguide comprises a core formed of polymer containing fluoride (F) of a 12-37 wt % on the basis of total weight of the polymer, and having repeating units with at least two &mdash;C(&boxH;O)&mdash;N&mdash;C(&boxH;O) functional groups or at least four &mdash;N&mdash;C(&boxH;O)&mdash; functional groups; and a cladding in contact with the core and formed of polymer having a refractive index lower than the polymer for forming the core. If a core layer is etched according to the ICP etching method, the etch rate becomes at least three times faster than that of the conventional RIE etching method. Also, etching characteristics including uniformity of an etched plane and vertical profile are improved, thereby reducing damage to an optical waveguide. Thus, the light scattering loss of the optical waveguide can be minimized. Also, the method for fabricating of a polymer optical waveguide according to the present invention is useful for mass production of polymer optical waveguides.

Polymer optical waveguide and method for fabricating the same

In an optical power splitter for splitting input light into N equal optical waves, and a manufacturing method therefor, a main waveguide and (N&minus;1) branched waveguides are arranged on one side or both sides of the main waveguide. The main waveguide and the (N&minus;1) branched waveguides form a directional coupler. In each of the directional couplers, the branched waveguide has an appropriate phase mismatch, a proper coupling coefficient, and a suitable coupling length to output 1/N of input optical power in the main waveguide. In the optical power splitter, when the main waveguide is semicircular, a circular substrate can be effectively used when the optical power splitter is manufactured.

Integrated optical power splitter and manufacturing method therefor

A fiber array module using soldering, and a fabrication method thereof, in which the method includes the steps of: forming holes into which optical fibers can be inserted, in a silicon wafer substrate or a ceramic substrate at predetermined intervals, forming a metal layer on the walls of the holes and the entire surface of the substrate, to allow walls of the holes and an entire surface of the substrate to be plated with a solder alloy material; plating the walls of the holes and the entire surface of the substrate with the solder alloy material; inserting metal-coated optical fibers into the holes plated with the solder alloy material; positioning the optical fibers at the centers of the holes using the surface tension of the solder alloy material, by heating the resultant structure; fixing the optical fibers, inserted into the holes of the substrate, to the substrate by pouring epoxy curable by heat or ultraviolet light thereon, to fabricate a fiber array module capable of being accurately attached to an optical waveguide device, and polishing an end of the optical fiber module formed of optical fibers protruding through the holes, to provide optical luminance. Accordingly, the environmental characteristics and reliability of a device package are improved upon the connection of the optical fibers. Also, the fiber array module is simply manufactured, and the ends of loaded optical fibers are easily polished, thus fabricating an inexpensive connection module. Furthermore, the optical fibers are accurately arrayed by self-alignment using the surface tension of the solder material.

Optical fiber array module using soldering and fabrication method thereof

A method of fabricating a planar optical waveguide in one chamber, comprising the steps of depositing a cladding layer and a core layer on a substrate, depositing an etch mask layer on the core layer, and forming a photoresist pattern on the etch mask layer. An etch mask pattern is formed by etching the etch mask layer according to the photoresist pattern using a first gas which reacts with the material of the etch mask layer, and removing the first gas. An optical waveguide is formed by etching the core layer according to the etch mask pattern using a second gas which reacts with the material of the core layer in the same chamber as the chamber where the above steps were performed, and removing the photoresist pattern and the second gas. The etch mask pattern is removed using the first gas which reacts with the material of the etch mask pattern in the same chamber as the chamber where the above steps were performed, and removing the first gas, and depositing an upper cladding layer formed of the same material as the core layer on the resultant structure of the above step. Accordingly, processes for fabricating an optical waveguide can be continuously performed in one chamber, thus simplifying and automating the optical waveguide fabrication method.

Method of fabricating planar optical waveguides in one chamber

An optical waveguide device for loss absorption, and a fabrication method thereof, are provided. The optical waveguide device for loss absorption includes: a substrate of a predetermined material; a lower cladding formed on the substrate; an optical waveguide formed on the lower cladding, and formed of a material having a refractive index greater than a refractive index of the lower cladding; an upper cladding formed so as to completely cover the optical waveguide; and an absorption layer formed of a material having refractive index greater than a refractive index of the upper cladding, and formed on the upper cladding to a thickness which can absorb a reflected or radiated optical signal. As described above, an absorption layer capable of absorbing light is formed in the waveguide device upon fabricating the optical waveguide, thus minimizing or removing loss due to reflection and radiation of an optical signal.

Optical waveguide device for loss absorption and fabrication method

Polyarylene ether for optical communications, expressed by the formula 1: ##STR1## The polyarylene ether has excellent resistance to heat and film processing properties and the light absorption loss in the wavelength range for optical communications is low. Also, by controlling the copolymerization ratio of a monomer whose hydrogen of C--H bond is substituted by F and a monomer whose hydrogen of C--H bond is substituted by Cl, the refractive index of the polymer can be adjusted to a level suitable for an optical material used for optical communications.

Polyarylene ether for optical communication

An integrated optical intensity modulator and a method for fabricating it. The integrated optical intensity modulator includes a substrate having spontaneous polarization, cut in an axial direction; an optical waveguide on the substrate; domain-inversion areas having domains reverse from the direction of spontaneous polarization, arranged in a staggered pattern around the optical waveguide; a first electrode on the optical waveguide on a surface of the substrate, and second and third electrodes on the substrate on opposite sides of and on the same surface as the first electrode. When a voltage is applied to the first electrode, a light wave is deflected and scattered in a domain-inversion area in accordance with a change of the refractive index of the domain-inversion area in the optical waveguide and the refractive index of the spontaneous polarization area. Since the domain-inversion structure of the ferroelectric substrate has a staggered pattern around the optical waveguide, and an optical guided mode is deflected by an applied voltage, only half the driving voltage of prior art structures is required for the optical waveguide. Deflecting the optical guided mode to the right and to the left alternatively, in multiple stages, increases the extinction ratio.

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Yongin, South Korea

Woo-hyuk Jang