Samsung Electronics Co., Ltd.

Wonik Jang

Changwook Jeong

Sanghoon Myung

Jinwoo Kim

Sunghee Lee

Jisu Ryu

Yongwoo Jeon

Kanghyun Baek

According to an aspect of the present inventive concept, a simulation method for a semiconductor fabrication process includes obtaining, as input data, process parameters for controlling a semiconductor process of manufacturing semiconductor devices, or design parameters representing a structure of the semiconductor devices, or both the process parameters and the design parameters; generating predictive data for electrical characteristics of the semiconductor devices using a machine learning model based on the input data; generating reference data for the electrical characteristics of the semiconductor devices using a simulation tool based on the input data; and training the machine learning model using the predictive data and the reference data.

Simulation method for semiconductor fabrication process and method for manufacturing semiconductor device

A non-transitory computer-readable medium storing a program code including an image generation model, which when executed, causes a processor to input input data including sampling data of some of a plurality of semiconductor dies of a wafer to a generator network of the image generation model and output a wafer map indicating the plurality of semiconductor dies, and to input the wafer map output from the generator network to a discriminator network of the image generation model and discriminate the wafer map.

Non-transitory computer-readable medium storing program code generating wafer map based on generative adversarial networks and computing device including the same

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Suwon-si, South Korea

Wonik Jang