Samsung Display Co., Ltd.

Won Woong Park

Min Soo Kim

Myung Soo Huh

Suk Won Jung

Sung Hun Key

Byeong Chun Lee

Jai Hyuk Choi

Hyun Woo Joo

A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode.

Plasma enhanced chemical vapor deposition apparatus that includes conductive mask supports

Growing community of inventors

Seoul, South Korea

Won Woong Park