Jusung Engineering Co., Ltd.

Won Woo Jung

Chul Joo Hwang

Jong Sik Kim

Young-Rok Kim

Min Ho Cheon

Jeong Mi Kim

Dong Seok Chun

Yoo Seong Kim

The present inventive concept relates to a substrate processing apparatus including a supporting part for supporting a substrate; a disk supporting a plurality of the supporting parts; a lid disposed on the disk; and a first protrusion portion coupled to the disk to protrude in an upward direction from the disk to the lid in a center region disposed inward from the supporting parts and a gap region disposed between the supporting parts.

Apparatus for processing substrate

One embodiment of a substrate supporting apparatus comprises: a support member for supporting a substrate; and a temperature compensating member disposed at the edge of the support member, and compensating the temperature of the substrate, wherein the support member may be made of a light-transmissive material, the temperature compensating member may be made of an opaque material, and the surface of the temperature compensating member may be made of a material having corrosion resistance against a cleaning gas.

Substrate supporting apparatus

Growing community of inventors

Gwangju-si, South Korea

Won Woo Jung