Samsung Electronics Co., Ltd.

Won-Shik Baek

Dong-Joo Bae

Kyu-Hyun Choi

Kyu-Hyun Chio

There is disclosed a stacked capacitor with high capacity which ensures structural stability in a DRAM cell and a method for manufacturing the same. The stacked-capacitor is of a hollow (or cylindrical) capacitor where both ends of several polysilicon layers which form a storage electrode are connected with each other. In construction, this inventive stacked-capacitor includes: a first polysilicon layer coupled to the source region so as to extend in parallel with surface of the substrate over the left and right sides of the source region; a bridge polysilicon layer, extending in the upward direction of the substrate from both ends of the first polysilicon layer; a dielectric film formed so as to contact with the surfaces of the bridge polysilicon layer, first polysilicon layer, second polysilicon layer; and a third polysilicon layer formed so as to contact with the surface of the dielectric film.

Method of making stacked-capacitor for a dram cell same

There is disclosed a stacked capacitor comprising a fin-shaped storage electrode of multiple polysilicon layers with supporting layers therebetween so as to compensate for the structural weakness of the fin-shaped storage electrode.

Stacked capacitor of a DRAM cell with fin-shaped electrodes having

A stacked capacitor of the fin-like structure is provided wherein the plurality of polysilicon layers constituting the storage electrode are connected with each other in the sawtooth-like manner to overcome the structural instability of the fin-like structure. The polysilicon layers constituting the storage electrode are extended overlaying each other, so that the capacity of the capacitor in a highly integrated DRAM may be increased without increasing the area occupied by the capacitor.

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Seoul, South Korea

Won-Shik Baek