1. Up Chemical Co., Ltd. (12 from 18 patents)

1. 12319705 - Ruthenium precursor composition, preparation method therefor, and formation method for ruthenium-containing film using same

2. 11912728 - Aluminum compounds and methods of forming aluminum- containing film using the same

3. 11485749 - Group 4 metal element-containing compounds, method of preparing the same, precursor compositions including the same for forming a film, and method of forming a film using the same

4. 10763001 - Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition

5. 10577385 - Group 5 metal compound, method for preparing the same, precursor composition for depositing layer containing the same, and method for depositing layer using the same

6. 10290493 - Method for manufacturing silicon-containing thin film

7. 10131680 - Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the same

8. 10014089 - Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition

9. 10005795 - Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same

10. 9957614 - Ruthenium compound, preparation method therefor, precursor composition for film deposition containing same, and method for depositing film by using same

11. 9353437 - Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same

12. 9255324 - Aluminum precursor composition