Samsung Electronics Co., Ltd.

Won-Je Park

Jae-Ho Song

Young-Hoon Park

Jin-Hyeong Park

Jung-Ho Park

Sang-il Jung

Tae-Seok Oh

Young-hoon Park

Chan Jae Park

Dae-cheol Seong

Jong-wook Hong

Keo-sung Park

Eun-soo Kim

Jeong-Hoon Bae

Won-jeong Lee

Pu-ra Kim

Disclosed is a image sensor (e.g., a CMOS image sensor) including pixels each having a transfer transistor and a drive transistor, in which the gate of at least one of the transistors has a boosting gate disposed over it comprised of a conductive film pattern with interposing an insulation film. Thus, a voltage applied to the boosting gate is capacitively coupled to at least one of the transfer gate of the transfer transistor and a drive gate of the drive transistor. The transfer gate is supplied with the sum of the transfer voltage and the boosting gate-coupling voltage as a result and there is no need for providing a high voltage generator for the image sensor. The dynamic range of operation may be enhanced if such a coupling voltage is applied to the drive gate of the drive transistor.

Image sensor with self-boosting transfer transistor gate and methods of operating and fabricating the same

Example embodiments disclose an image sensor capable of preventing or reducing image lag and a method of manufacturing the same. Example methods may include forming a gate insulating film and a gate conductive film doped with a first-conductive-type dopant on a semiconductor substrate; forming a transfer gate pattern by patterning the gate insulating film and the gate conductive film; and fabricating a transfer gate electrode by forming a first-conductive-type photodiode in the semiconductor substrate adjacent to one region of the transfer gate pattern, by forming a second-conductive-type photodiode on the first-conductive-type photodiode, and by forming a first-conductive-type floating diffusion region in the semiconductor substrate adjacent to the other region of the transfer gate pattern.

Image sensor and method of manufacturing the same

Image sensor devices are provided having reduced dark current generation characteristics. These image sensor devices include a semiconductor substrate and a photo-detector therein (e.g., P-N photodiode). The photo-detector includes a charge-generating region therein that is configured to convert photons received by the photo-detector into charge carriers. A first transistor, which has a terminal configured to receive the charge carriers generated by the photo-detector, is also provided. The first transistor includes a first gate electrode and a first pair of lightly doped source and drain regions of unequal width on opposite sides of the first gate electrode. This first transistor may be a three-terminal device and the terminal that is configured to receive the charge carriers may be selected from a group consisting of a gate, source and drain terminals. In particular, the first transistor may be configured as a reset transistor or as a source-follower transistor.

Image sensors and methods of fabricating same

An image sensor includes a substrate having an active pixel sensor region defined therein, a plurality of first conductivity type photodiodes formed in the active pixel sensor region and a first conductivity-type first deep well formed in the active pixel sensor region in a location which does not include the plurality of the first conductivity-type photodiodes. Moreover, the first deep well is electrically connected to a positive voltage.

Image sensor and fabrication method thereof

An image sensor comprising a transfer gate electrode having a uniform impurity doping distribution is provided. The image sensor further comprises a semiconductor substrate comprising a pixel area, wherein the pixel area comprises an active region and the transfer gate electrode is disposed on the active region. A method of fabricating the image sensor is also provided. The method comprises preparing a semiconductor substrate, forming a polysilicon layer on the semiconductor substrate, doping the polysilicon layer with impurity ions, and patterning the polysilicon layer.

Image sensor and related fabrication method

A CMOS image sensor includes a field isolation film defining first, second, and third active fields in a substrate having a first conductivity type, a photodiode region in the first active field, the photodiode region having a second conductivity type opposite the first conductivity type, and a floating diffusion region of the second conductivity type in the second active field. A source follower gate is conductively connected with the floating diffusion region and intersects the second active field. First and second source/drain regions of the second conductivity type are provided in the second active field at opposite sides of the source follower gate, and a pickup region is disposed in the third active field. The third active field may be adjacent a portion of the second active field where the first source/drain region or the second source/drain region is located, and the floating diffusion region may be isolated from the first and second source/drain regions.

CMOS image sensors including pickup regions

Provided are methods of fabricating an image sensor. Embodiments of such methods can include forming a first gate insulation layer in a first region of a semiconductor substrate and a first gate electrode layer, to cover the first gate insulation layer and forming a second gate insulation layer within a nitrogen enhanced atmosphere and a second gate electrode layer in a second region of the semiconductor substrate. The methods also include patterning the first gate electrode layer and the first gate insulation layer of the first region to form a first gate pattern and patterning the second gate electrode layer and the second gate insulation layer of the second region to form a second gate pattern.

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Suwon-si, South Korea

Won-Je Park