Siemens Aktiengesellschaft

Infineon Technologies Ag

W.c. Heraeus Gmbh & Co Kg

Pyreos Ltd.

Bundesanstalt Fur Materialforschung Und - Prufung

Wolfram Wersing

Karl Lubitz

Jutta Mohaupt

Rainer Bruchhaus

Hans Kaarmann

Martina Vogt

Matthias Schreiter

Manfred Schnoeller

Reinhard Gabl

Ulrich Bast

Gabriele Preu

Harald Schmidt

Ruth M&auml;nner

Franz Hofmann

Roland Thewes

Wolfgang Werner

Lothar Risch

Wolfgang Krautschneider

Carsten Giebeler

Oliver Dernovsek

Harald Landes

Hans-Dieter Feucht

Ingmar Feigt

Heinrich Zeininger

Dieter Cramer

Reinhard Lerch

Thorsten Steinkopff

Wolfgang Eckhardt

Dana Pitzer

Peter Fromherz

Klaus Burkhardt

Helmut Thomann

Bjorn-Oliver Eversmann

Christina Modes

Martin Jenkner

Robert Primig

Dieter Baeuerle

Markus Eberstein

Silvia Gohlke

Roman Karmazin

Michael Eyett

Ulrich Fritz

Silvia Gohike

Klaudia Hradil

Ruth M Anner

Manfred Schn Oller

Christoph N Olscher

Ellen Ivers-Tiffee

Tamara Birkenmaier

Marion Gemeinert

Wolfgang Arno Schiller

The invention relates to a method for producing a polycrystalline ceramic film on a surface () of a substrate (), in which a particle stream is directed onto the surface () and the ceramic film is formed by deposition of the particles onto the surface (), wherein the particle stream is directed by means of a diaphragm onto the surface () along a preferred direction until a first specified layer thickness is reached, the preferred direction and a surface normal of the surface () enclosing a specified angle of incidence. According to the invention, the diaphragm is removed from the particle stream after the specified layer thickness has been reached, and additional particles are directed onto the surface () until a specified second layer thickness has been reached.

Method for producing a polycrystalline ceramic film

A method for producing a micro system, said method comprising: providing a substrate () made of aluminum oxide; producing a thin film () on the substrate () by depositing lead zirconate titanate onto the substrate () with a thermal deposition method such that the lead zirconate titanate in the thin film () is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate () together with the thin film ().

Method for producing a microsystem having a thin film made of lead zirconate titanate

A device for detecting at least one substance of a fluid includes at least one piezo-acoustic resonator with at least one piezo layer, an electrode arranged on the piezo-electric layer, at least one other electrode arranged on the piezo-electric layer and a surface section used for sorption of the substance of the fluid. The piezo-electric layer, the electrodes and the surface section are disposed in such a way that electric control of the electrodes leads to an oscillation of the resonator at a resonance frequency which depends upon the amount of the substance which is sorbed on the surface section. The thickness of the pioelectric layer is in the region of 0.5 to 20 &#x3bc;m and the resonance frequency of the oscillation ranges from 500 MHz to 2 GHz. The device is a mass sensor with a piezo-acoustic high-frequency thin film resonator.

Device and method for detecting a substance of a liquid

Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO.

CMOS-process compatible high-DC surface coating for capacitive detection and stimulation of biological tissues

The invention relates to a glass ceramic mass containing at least one oxide ceramic containing barium, titanium and at least one rare earth metal Rek; and at least one glass material containing at least one oxide with boron, at least one oxide with silicon and at least one oxide with at least one bivalent metal Me2+. The glass ceramic mass is characterised in that the glass material contains at least one oxide with bismuth, especially bismuth trioxide. The oxide ceramic is especially a microwave ceramic of formula BaRek2Ti4O12, Rek being neodymium or samarium. The composition of the oxide ceramic remains essentially constant during the sintering of the glass ceramic, enabling the material properties of the glass ceramic mass, such as permittivity (20&#x2013;80), quality (800&#x2013;5000) and Tkf (&#xb1;20 ppm/K) to be specifically predetermined. The glass ceramic mass is characterised by a densification temperature of under 910&#xb0; C. and can is therefore suitable for use in LTCC (low temperature cofired ceramics) technology, for integrating a passive electrical component in the volume of a multilayered ceramic body. Silver in particular can be used as an electroconductive material in this case.

Glass ceramic mass and use thereof

A ceramic mass includes one ceramic material and at least a second different ceramic material. Glass material is arranged between the ceramic materials. The glass material reduces the sintering temperature of the ceramic mass and prevents the various ceramic materials from forming a mixed crystal when the ceramic mass is sintered. The ceramic mass is suitable for use in LTCC technology for the production of capacitors whose permittivity is dependent upon a specific temperature range.

Ceramic mass, method for the production of a ceramic mass and use of a ceramic mass

The invention is directed to an extremely low-capacitance device for shaping an electron beam. The device is based on a ceramic body having a monolithic multi-layer structure. The manufacture of the ceramic body ensues with the assistance of LTCC technology, whereby this method is designationally modified. The body is constructed of pre-sintered ceramic layers whose lateral shrinkage is suppressed. The through apertures of the electrodes for the electron beam are thus arranged exactly coaxially, and the tolerances of the electrode dimensions are decoupled from the shrinkage during sintering. The electron beam of an electron gun is focused and the intensity thereof is modulated with the assistance of such a device.

Device for shaping an electron beam, method for producing said device and use thereof

A memory cell configuration and a method for its production include stacked capacitors and use a vertical storage capacitor having a ferroelectric or paraelectric storage dielectric. In order to produce the storage capacitor, a dielectric layer for the storage dielectric is produced over the whole area. The dielectric layer is subsequently structured and first electrodes and second electrodes for the storage capacitors are formed. The invention is suitable for Gbit DRAMs and for nonvolatile memories.

Memory cell configuration and method for its production

A thin-film technology multi-layer capacitor with enhanced capacitance and/or reduced space requirement. The dielectric layers of which are alternately disposed between electrode layers on a substrate. Through alternate electrode layer connections, parallel interconnection of the individual capacitor layers is obtained. The result is that the individual capacitances are additive, while the temperature response can be optimized by a suitable choice or combination of different dielectric layers.

Multilayer capacitor with high specific capacitance and production

A semiconductor detector for infrared radiation is manufactured by the steps of depositing an auxiliary layer on a main surface of a carrier, depositing a membrane layer provided with at least one opening onto the auxiliary layer, selectively etching the auxiliary layer through the at least one opening of the membrane layer, so that a hollow space arises in the auxiliary layer, sealing the hollow space by depositing a covering on th membrane layer, and fashioning a detector element on the covering by depositing a material sensitive to infrared radiation within a region of the covering that is bounded by the hollow space therebelow.

Semiconductor detector for infrared radiation and method for

Pyrodetector element having a pyroelectric layer produced by oriented

High-temperature fuel cell with improved solid-electrolyte/electrode

Ferroelectric memory cell arrangement

A method for producing a superconducting layer of YBa.sub.2 CU.sub.3 O.sub.7 on a sapphire substrate utilizes the steps of epitaxially growing an intermediate layer that at least contains a yttrium-stabilized zirconium oxide layer directly on the substrate, and then epitaxially growing a superconducting layer on the intermediate layer. In one embodiment, the step of growing the intermediate layer grows two sub-layers, with the first sub-layer being a yttrium-stabilized zirconium oxide layer and a second sub-layer being a yttrium oxide layer applied onto the first sub-layer.

Method for producing a superconductor layer of YBa.sub.2 Cu.sub.3

A composite ultrasound transducer (array) contains piezoelectric ceramic transducer elements which radiate substantially in the longitudinal direction, and are embedded in a polymer matrix. The transducer elements have such a geometrical structure, and are arranged relative to each other, so that the development of oscillation modes perpendicular to the longitudinal direction of the transducer elements is suppressed. A method for manufacturing the composite ultrasound transducer includes the steps of filling a plastic form, having a 'negative' of the desired shape of the transducer elements, with ceramic slurry, and pyrolyzing the plastic form after the slurry dries therein. The resulting voids between the hardened ceramic elements are filled with polymer to create the overall composite transducer. The transducer elements can thus be given an arbitrary shape and arrangement, such as hexagonal or irregular square structures, having a trapezoidal cross-section in planes parallel to the longitudinal axis of the transducer elements.

Composite ultrasound transducer and method for manufacturing a

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Kirchheim, Germany

Wolfram Wersing