Robert Boschgmbh

Wolfram Geiger

Rolf Scheben

Thorsten Balslink

Robert Maul

Matthias Kuehnel

Nils Felix Kuhlmann

Steffen Markisch

Johannes Classen

Andrea Visconti

Ruslan Khalilyulin

Matthias Meier

Thomas Zebrowski

Istvan Kadar-Nemet

A sensor system including a chip arrangement, the chip arrangement including a sensor and an acceleration sensor, and the sensor system including a processor circuit. The processor circuit is configured in such a way that: one or multiple temperature-dependent variables and/or properties of the sensor are ascertained, and an offset of a signal of the acceleration sensor induced by a temperature gradient is corrected with the aid of the one or the multiple ascertained temperature-dependent variables and/or properties of the sensor.

Sensor system, method for operating a sensor system

A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.

Micromechanical component for a rotation rate sensor and corresponding manufacturing method

A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.

Micromechanical component for a yaw rate sensor and corresponding production method

Recalibrating a micromechanical sensor. The sensor is assigned a signal processing device for correcting the sensor signal on the basis of at least one previously determined initial trim value that is selected such that, given a defined sensor excitation, a production-related deviation of the sensor signal from a target sensor signal is compensated. The method for recalibrating the sensor includes: applying a defined electrical test excitation signal to the sensor structure, acquiring the corresponding sensor response signal, ascertaining a trim correction value for the at least one initial trim value on the basis of a previously determined relation between the sensor response signal and the trim correction value, and determining at least one current trim value for correcting the sensor signal, the determination of the at least one current trim value taking place on the basis of the at least one initial trim value and the ascertained trim correction value.

Method for recalibrating a micromechanical sensor, and recalibrateable sensor

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Gomaringen, Germany

Wolfram Geiger