Northrop Grumman Litef Gmbh

Litef Gmbh

Wolfram Geiger

Peter Leinfelder

Uwe Breng

Guenter Spahlinger

Julian Bartholomeyczik

Eberhard Handrich

Martin Hafen

Günter Spahlinger

A method for optimizing the switch-on time of a Coriolis gyroscope () having a mass system () which can be excited to an excitation oscillation of the Coriolis gyroscope () parallel to a first axis (x), wherein a deflection of the mass system on account of a Coriolis force along a second axis (y) which is provided perpendicular to the first axis (x) can be verified using an output signal from the Coriolis gyroscope, comprises determining the amplitude (A) of the excitation oscillation of the Coriolis gyroscope at a defined time, determining the output signal (S) from the Coriolis gyroscope at the defined time, and generating a normalized output signal (S) from the Coriolis gyroscope by multiplying the determined output signal (S) by the quotient of the amplitude (A) of the excitation oscillation of the Coriolis gyroscope in the steady state and the determined amplitude (A).

Method for optimizing the switch-on time of a coriolis gyroscope and coriolis gyroscope suitable thereof

A component is produced by creating a first layer composite that includes a first electrically conductive substrate and having a trench filled with an insulating material by creating a second layer composite that includes the first layer composite and a structure layer. The structure layer includes an active structure and is electrically conductive at least in a first region that adjoins a first surface of the first substrate and includes in the first region of the first substrate a first electrically conductive contact face on a second surface of the first substrate, which is located opposite the first surface. The first region of the first substrate is electrically insulated laterally from other regions of the first substrate by the trench.

Method for producing a micro-electromechanical component and a micro-electromechanical component

In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression. After the first layer composite has been connected to the second layer composite, the thickness of the first layer composite from a second surface of the first layer composite to the depth of the filled trench is reduced. The second surface of the first layer composite lies opposite the first surface of the first layer composite. The method further has the step of producing an active structure in the structured layer, said active structure comprising two second regions which are arranged in the first region of the structured layer and which are mechanically connected to each other in a rigid manner but are electrically insulated from each other by means of the filled trench.

Method for producing a component

The invention relates to an acceleration sensor, comprising a substrate having a substrate surface and a sample mass that is movable relative to the substrate in a first direction (x) parallel to the substrate surface. The sample mass has a comb-like electrode that is movable together with the sample mass and has a plurality of teeth, which extend in the first direction (x). The acceleration sensor further comprises a counter-electrode fixedly connected to the substrate, which counter-electrode has a fixed comb-like electrode and wherein said fixed comb-like electrode has a plurality of teeth which extend in a direction opposite to the first direction (x). The teeth of the movable comb-like electrode engage with the teeth of the fixed comb-like electrode. The acceleration sensor further comprises a shielding electrode fixedly connected to the substrate and which is suitable for increasing a pneumatic damping of the sample mass during a deflection movement of the sample mass.

Acceleration sensor and method for producing an acceleration sensor

A Coriolis gyroscope comprises a mass system that can be excited to perform vibrations parallel to a first axis, whereby a deflection of the mass system due to a Coriolis force along a second axis perpendicular to the first axis is detectable. At least one first correction unit and at least one second correction unit, which each comprise a plurality of stationary correction electrodes and moving correction electrodes whereby the stationary correction electrodes extend in the direction of the first axis and are firmly connected to the substrate by corresponding anchor structures, and the moving correction electrodes are provided as a part of the mass system. A method for reducing the quadrature bias of a Coriolis gyroscope of this type comprises applying at least temporarily constant corrective voltages to the correction units.

Coriolis gyroscope having correction units and method for reducing the quadrature bias

A rotation rate sensor comprises a substrate and two structures which move relative to the substrate on a design plane (x-y), with the two moving structures being coupled to form a coupled structure such that the coupled structure has a first oscillation mode with antiphase deflections of the moving structures in a first direction (x) on the design plane (x-y) as excitation mode. The coupled structure has a second oscillation mode as a detection mode which is excited by Coriolis accelerations when the first oscillation mode is excited and on rotation about a sensitive axis (z) of the rotation rate sensor. The sensitive axis is at right angles to the design plane (x-y), and the coupled structure is designed such that, subject to optimal preconditions, it does not have any oscillation mode which can be excited by linear accelerations of the rotation rate sensor in a direction parallel to the second axis.

Rotation rate sensor

A Coriolis gyro having an arrangement which comprises a substrate, at least two individual structures and spring elements. The spring elements couple the individual structures to the substrate and to one another. Force transmitters and taps are provided. The arrangement has at least one excitation mode which can be excited by the force transmitters and at least one detection mode which can be measured by the taps. The excitation mode and the detection mode are closed, as a result of which no disturbance excitations of the excitation mode and of the detection mode can be caused by linear accelerations and/or vibrations if there is no need to take account of manufacturing tolerances.

Coriolis gyro

A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.

Method for the production of a component, and component

A method for fabricating a microelectromechanical or microoptoelectromechanical component. The method includes producing first and second layer composites. The first has a first substrate and a first insulation layer, which covers at least one part of the surface of the first substrate, while the second has a second substrate and a second insulation layer, which covers at least one part of the surface of the second substrate. An at least partly conductive structure layer is applied to the first insulation layers and the second composite is applied to the structure layer so that the second insulation layer adjoins the structure layer. The first and second layer composites and the structure layer are configured so that at least one part of the structure layer that comprises the active area of the microelectromechanical or microoptoelectromechanical component is hermetically tightly sealed by the first and second layer composites. Contact holes are formed for making contact with conductive regions of the structure layer within the first and/or second substrate.

Micromechanical component and method for fabricating a micromechanical component

A method for quadrature-bias compensation in a Coriolis gyro whose resonator is in the form of a coupled system comprising a first and a second linear oscillator. The quadrature bias of the Coriolis gyro is determined. An electrostatic field is produced by variation of the mutual alignment of the two oscillators with respect to one another. The alignment/strength of the electrostatic field is regulated so that the determined quadrature bias is made as small as possible.

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Freiburg, Germany

Wolfram Geiger