Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Jenoptik Ldt Gmbh

Technische Univeristaet Chemnitz

Wolfram Doetzel

Thomas Gessner

Christian Kaufmann

Jan Mehner

Karla Hiller

Steffen Kurth

Ramon Hahn

Steffen Kurt

Dirk Tenholte

The invention relates to a sensor element for pressure measurement, having a substrate () and at least one mass element (), which is arranged spaced apart from the substrate () and is connected in an oscillating manner to the substrate () and/or a support body () fixed relative to the substrate (), so that a gap is formed between the mass element () and the substrate (), the width of which can be varied through oscillations of the mass element (). At least one recess and/or at least one bushing () is located in the surface of the substrate () delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10mbar.

MEMS vacuum sensor based on the friction principle

A resonance scanner, wherein a frame (), a drive plate (), a mirror () and torsion springs () form an actuator part (), said drive plate () being attached within the frame () by two first torsion springs () such that the drive plate () can oscillate about a common first axis of torsion () of both torsion springs (), said mirror () being attached within the drive plate () by two second torsion springs () such that the mirror () can oscillate about a common second axis of torsion () of both torsion springs (), and said first axis of torsion () and said second axis of torsion () being parallel to each other; wherein, further, only the frame () of the actuator part () is attached to side walls () of a box-shaped stator part (), a drive means (stator electrodesor coil) is arranged at a bottom () of the stator part () only in the region of the geometrical surface area of the drive plate () and said bottom () has a recess () in the region of the geometrical surface area of the mirror (), which recess () is dimensioned at least such that a maximum mechanical deflection of the mirror () is not limited by the bottom (), said drive means (stator electrodesor coil) applying a force only directly to the drive plate () and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (), which differs from the eigenfrequency of the drive plate ().

Resonance scanner

Growing community of inventors

Chemnitz, Germany

Wolfram Doetzel